Micro-electromechanical system (MEMS) based current and magnetic field sensor

1. A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a current carrying conductor comprising:

a magneto-MEMS component for sensing the magnetic field;

an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are configured to provide an unprocessed indication of the magnetic field.

2. The MEMS magnetic field sensor of claim 1 wherein the magnetic field is produced by a current carrying conductor.

3. The MEMS magnetic field sensor of claim 2 , wherein the magneto-MEMS MEMS component comprises a first mechanical sense component and the interference MEMS component comprises a second mechanical sense component, wherein the magnetic field is sensed based at least in part upon a change experienced by the first and second mechanical sense components.

4. The MEMS magnetic field sensor of claim 3 , further comprising:

a magnetic-to-mechanical converter in operable communication with the first mechanical sense component such that the magnetic-to-mechanical converter exerts a measurable force on the first mechanical sense component when exposed to the magnetic field; and

an interference-to-mechanical converter in operable communication with the second mechanical sense component such that the interference-to-mechanical converter exerts a measurable force on the second mechanical sense component when exposed to the interference.

5. The MEMS magnetic field sensor of claim 4 , wherein the magnetic-to-mechanical converter comprises a second conductor.

6. The MEMS magnetic field sensor of claim 2 , wherein the magneto-MEMS component comprises:

a first structural component having a cavity defined therein and a supportive material defined at least partly above the cavity;

a second structural component in operable communication with the first structural component; and

a third conductor in operable communication with at least one of the first and second structural components for providing a mechanical indication of the magnetic field.

7. The MEMS current and magnetic field sensor of claim 2 , wherein the interference-MEMS component comprises:

a third structural component having a cavity defined therein and a supportive material disposed at least partly above the cavity;

a fourth structural component in operable communication with the first structural component; and

a fourth conductor in operable communication with at least one of the third and fourth structural components for providing a mechanical indication of the interference.

8. The MEMS current and magnetic field sensor of claim 6 , wherein the supportive material comprises:

a cantilever, a deflectable membrane, a diaphragm, or a flexure member.

9. The MEMS current and magnetic field sensor of claim 7 , wherein the supportive material comprises:

a cantilever, a deflectable membrane, a diaphragm, or a flexure member.