Solid-state imaging device
View Patent ↗A solid-state imaging device has a plurality of photoelectric conversion elements two dimensionally arrayed in an imaging area, a light shielding film that regulates the amount of external light incident on the photoelectric conversion elements by a wiring pattern, a wiring layer placed between the light shielding film and the photoelectric conversion elements, and a plurality of contacts electrically connecting the light shielding film with the wiring layer in a lamination direction. The shape of the light shielding film is defined by a plurality of first figures overlapping with a second figure, each first figure being placed over a different contact in plan view, and the second figure having a plurality of apertures each corresponding to a different photoelectric conversion element. The center of each aperture in the second figure is displaced further from the center of a corresponding photoelectric conversion element toward the middle of the imaging area in plan view, as distance from the middle of the imaging area increases. Furthermore, a positional relation of the first figures with the second figure differs depending on location in the imaging area.
1. A MOS-type solid-state imaging device comprising:
a plurality of photoelectric conversion elements two dimensionally arrayed in an imaging area;
a light shielding film that is a single film and regulates an amount of external light incident on the photoelectric conversion elements by a wiring pattern;
a wiring layer placed between the light shielding film and the photoelectric conversion elements in a lamination direction; and
a plurality of contacts electrically connecting the light shielding film with the wiring layer, wherein
a shape of the light shielding film is defined by a plurality of first figures combined with a second figure, each first figure being placed over a different contact in plan view, and the second figure having a plurality of apertures each corresponding to a different photoelectric conversion element,
a center of each aperture in the second figure is displaced further from a center of a corresponding photoelectric conversion element toward a middle of the imaging area in plan view, as distance from the middle of the imaging area increases,
a positional relation of the first figures with the second figure differs depending on location in the imaging area, and
the first figures are positioned within the apertures in the second figure on a periphery of the imaging area.
2. The MOS-type solid-state imaging device of claim 1 , wherein the displacement of each aperture center from the center of a corresponding photoelectric conversion element increases in proportion to distance from the middle of the imaging area.
3. The MOS-type solid-state imaging device of claim 1 , wherein the displacement of each aperture center from the center of a corresponding photoelectric conversion element increases stepwise according to distance from the middle of the imaging area.
4. The MOS-type solid-state imaging device of claim 1 , wherein the first figures have substantially similar positional relations with corresponding contacts regardless of location in the imaging area, are substantially similar in size regardless of location in the imaging area, and are large enough to overlap with the second figure at a furthest location from the middle of the imaging area.
5. The MOS-type solid-state imaging device of claim 1 , wherein an interval between adjacent first figures interposed with a photoelectric conversion element in plan view increases as distance from the middle of the imaging area increases.
6. The MOS-type solid-state imaging device of claim 5 , wherein the imaging area is divided into a plurality of sub-areas, and the interval between adjacent first figures in respective sub-areas is constant.
7. The MOS-type solid-state imaging device of claim 1 , wherein each first figure increases in size as distance from the middle of the imaging area increases.
8. The MOS-type solid-state imaging device of claim 7 , wherein a pattern width of each first figure in the middle of the imaging area is equivalent to a pattern width of the second figure, in a pattern widthwise direction of the second figure near a contact corresponding to the first figure.
9. The MOS-type solid-state imaging device of claim 1 , wherein the imaging area is rectangular, and each first figure is placed adjacent to a closest photoelectric conversion element in a short direction of the imaging area.