Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices
View Patent ↗A broad-beam laser irradiation apparatus can measure the parametric or functional response of a semiconductor device to exposure to dose-rate equivalent infrared laser light. Comparisons of dose-rate response from before, during, and after accelerated aging of a device, or from periodic sampling of devices from fielded operational systems can determine if aging has affected the device's overall functionality. The dependence of these changes on equivalent dose-rate pulse intensity and/or duration can be measured with the apparatus. The synchronized introduction of external electrical transients into the device under test can be used to simulate the electrical effects of the surrounding circuitry's response to a radiation exposure while exposing the device to dose-rate equivalent infrared laser light.
1. A broad-beam laser irradiation apparatus for measuring the dose-rate response of a semiconductor device under test, comprising:
at least one infrared laser that produces a, broad-area pulse of laser light, having a laser pulsewidth and intensity, directed onto the surface of the semiconductor device, and
means for measuring the functional or parametric response to charge generated in an electrically active region of the semiconductor device resulting from the laser irradiation of the surface of the semiconductor device.
2. The apparatus of claim 1 , wherein the infrared laser comprises a laser diode or laser diode array.
3. The apparatus of claim 1 , wherein the wavelength of the infrared laser provides a penetration depth comparable to the length-scale for charge collection of photocurrent in the electrically active region of the semiconductor device.
4. The apparatus of claim 1 , wherein the measuring means comprises a waveform digitizer for measuring the charge collection signal from the semiconductor device.
5. The apparatus of claim 1 , further comprising means for varying the pulsewidth of the laser pulse.
6. The apparatus of claim 1 , further comprising means for time-varying the intensity of the laser irradiation.
7. The apparatus of claim 1 , further comprising an imaging device to image the laser irradiation of the surface of the semiconductor device.
8. The apparatus of claim 7 , wherein the imaging device comprises a charge coupled device array.
9. The apparatus of claim 1 , further comprising an energy detector to measure the energy of the laser irradiation of the surface of the semiconductor device.
10. The apparatus of claim 1 , further comprising at least one beam splitter to transmit a fraction of the light from each of the at least one infrared laser to the surface of the semiconductor device.
11. The apparatus of claim 10 , wherein the remaining light from the at least one beam splitter is reflected onto an energy detector.
12. The apparatus of claim 10 , wherein the light reflected from the surface of the semiconductor device is reflected by the at least one beam splitter into an imaging device.
13. A method for measuring the dose-rate response of a semiconductor device under test, comprising:
exposing the surface of the semiconductor device to a broad-area pulse of light, having a laser pulsewidth and intensity, from at least one infrared laser, and
measuring the functional or parametric response to charge generated in an electrically active region of the semiconductor device resulting from the laser irradiation of the surface of the semiconductor device.
14. The method of claim 13 , further comprising repeating the exposing and measuring steps at least once at a different laser deposited energy.
15. The method of claim 13 , further comprising repeating the exposing and measuring steps at least once at a different laser pulsewidth.
16. The method of claim 13 , further comprising injecting at least one electrical transient into an electrical line of the semiconductor device during the exposing step.
17. The method of claim 13 , further comprising time-varying the intensity of the laser irradiation.
18. The method of claim 13 , further comprising imaging the laser irradiation of the surface of the semiconductor device exposed to the broad-area pulse of light.
19. The method of claim 18 , further comprising measuring the uniformity of the image of the laser irradiation.