Method and system for providing perpendicular magnetic recording transducers
View Patent ↗A method and system for providing a magnetic recording transducer are disclosed. The method and system include providing a metallic underlayer directly on a portion of an insulating layer. The method and system also include forming a perpendicular magnetic recording pole on the metallic underlayer. The perpendicular magnetic recording pole has a top, a bottom narrower than the top, and sides. The perpendicular magnetic recording pole has a pole removal rate. The method and system also include providing an insulator having an insulator removal rate. The insulator substantially surrounds at least the sides of the perpendicular magnetic recording pole. The metallic underlayer has a removal rate that is at least one of less than the insulator removal rate and substantially equal to the pole removal rate.
1. A method for manufacturing a perpendicular magnetic recording transducer comprising:
providing a metallic underlayer directly on a portion of an insulating layer;
forming a perpendicular magnetic recording pole on the metallic underlayer, the perpendicular magnetic recording pole having a top, a bottom narrower than the top, and sides, the perpendicular magnetic recording pole having a pole removal rate; and
providing an insulator having an insulator removal rate, the insulator substantially surrounding at least the sides of the perpendicular magnetic recording pole, the metallic underlayer having a removal rate that is at least one of less than the insulator removal rate and substantially equal to the pole removal rate.
2. The method of claim 1 wherein the metallic underlayer is a metallic stop layer, wherein the insulator providing is performed before the perpendicular magnetic recording pole forming; and wherein the perpendicular magnetic recording pole forming further includes:
creating a trench in the insulator, the trench having a bottom and a top, the bottom of the trench including at least a portion of the metallic stop layer and being narrower than the top, the removal rate of the metallic underlayer being less than the insulator removal rate during the trench creating; and
depositing a perpendicular magnetic pole layer of the perpendicular magnetic recording pole in the trench.
3. The method of claim 2 wherein the perpendicular magnetic recording pole forming further includes:
performing a planarization.
4. The method of claim 2 wherein the metallic underlayer providing further includes:
providing the metallic underlayer having a thickness of at least two hundred Angstroms.
5. The method of claim 4 wherein the thickness is at least five hundred Angstroms.
6. The method of claim 5 wherein the thickness is not more than one thousand Angstroms.
7. The method of claim 2 wherein the removal rate of the metallic underlayer is ⅓ through ½ of the insulator removal rate during the trench creating.
8. The method of claim 1 wherein the perpendicular pole forming further includes:
forming a pole prior to providing the metallic underlayer; and
removing a portion of the insulating layer adjacent to the pole to form a trench.
9. The method of claim 8 wherein the metallic underlayer providing further includes:
refilling the trench with a metallic material to form the metallic underlayer having a back, the back of the metallic underlayer being adjacent to the pole.
10. The method of claim 9 further wherein the perpendicular magnetic recording pole forming further includes:
performing a planarization such that a top surface of the metallic underlayer and a top surface of the pole are substantially coplanar.
11. The method of claim 10 wherein the perpendicular magnetic recording pole forming further includes:
providing a pole layer on the metallic underlayer, the pole layer having the pole removal rate; and
removing a portion of the pole layer, the pole removal rate being less than or substantially equal to the removal rate of the metallic underlayer during the removing.
12. The method of claim 11 wherein the perpendicular magnetic recording pole forming further includes:
performing a pole trim to provide the perpendicular magnetic recording pole.
13. The method of claim 8 wherein the metallic underlayer includes at least one of NiCr, NiNb, Ru, and Ta.
14. The method of claim 1 wherein the metallic underlayer includes a plurality of layers.
15. A perpendicular magnetic recording transducer comprising:
an insulating layer;
a metallic underlayer residing directly on a portion of the insulating layer;
a perpendicular magnetic recording pole having a top and a bottom narrower than the top, at least a portion of the perpendicular magnetic recording pole residing on a first portion of the underlayer;
an insulator having an insulator removal rate, the insulator substantially surrounding at least the sides of the perpendicular magnetic recording pole, the metallic underlayer having a removal rate that is at least one of less than the insulator removal rate and greater than or substantially equal to the pole removal rate.
16. The perpendicular magnetic recording transducer of claim 15 wherein the metallic underlayer providing further has a thickness of at least two hundred Angstroms.
17. The perpendicular magnetic recording transducer of claim 16 wherein the thickness is at least five hundred Angstroms.
18. The perpendicular magnetic recording transducer of claim 17 wherein the thickness is not more than one thousand Angstroms.
19. The perpendicular magnetic recording transducer of claim 15 wherein the metallic underlayer has a back, the perpendicular magnetic recording transducer further comprising:
a pole having a notched front, the back of the metallic underlayer being adjacent to the notched front of pole.
20. The perpendicular magnetic recording transducer of claim 19 further wherein metallic underlayer has a top surface that is substantially coplanar with a pole top surface of the pole.
21. The perpendicular magnetic recording transducer of claim 15 wherein the metallic underlayer includes at least one of NiCr, NiNb, Ru, and Ta.
22. The perpendicular magnetic recording transducer of claim 15 wherein the metallic underlayer includes a plurality of layers.
23. A perpendicular magnetic recording head comprising:
a slider; and
a perpendicular magnetic recording transducer adjacent to the slider, the transducer including an insulating layer, a metallic underlayer residing directly on a portion of the insulating layer, a perpendicular magnetic recording pole having a top and a bottom narrower than the top, at least a portion of the perpendicular magnetic recording pole residing on a first portion of the underlayer, and an insulator having an insulator removal rate, the insulator substantially surrounding at least the sides of the perpendicular magnetic recording pole, the metallic underlayer having a removal rate that is at least one of less than the insulator removal rate and greater than or substantially equal to the pole removal rate.
24. The perpendicular magnetic recording head of claim 23 wherein the metallic underlayer providing further has a thickness of at least two hundred Angstroms.
25. The perpendicular magnetic recording head of claim 24 wherein the thickness is at least five hundred Angstroms.
26. The perpendicular magnetic recording head of claim 25 wherein the thickness is not more than one thousand Angstroms.
27. The perpendicular magnetic recording head of claim 23 wherein the metallic underlayer has a back, the perpendicular magnetic recording head further comprising:
a pole having a notched front, the back of the metallic underlayer being adjacent to the notched front of pole.
28. The perpendicular magnetic recording head of claim 23 further wherein metallic underlayer has a top surface that is substantially coplanar with a pole top surface of the pole.
29. The perpendicular magnetic recording head of claim 23 wherein the metallic underlayer includes at least one of NiCr, NiNb, Ru, and Ta.
30. The perpendicular magnetic recording head of claim 23 wherein the metallic underlayer includes a plurality of layers.