Semiconductor device
View Patent ↗An object of the present invention is to provide a semiconductor device which enables to reduce the device area, while securing the breakdown voltage between the drain and the source of each MOS transistor for the semiconductor device including plural MOS transistors, which are arrayed adjacently each other, with different types of channel conductivity. The semiconductor device includes a semiconductor substrate, a buried oxide film and a semiconductor layer, and furthermore the semiconductor layer has an island-like semiconductor layer, in which a MOS transistor is formed, the MOS transistor has a source region, and a drain region that is positioned in the periphery of the source region, an island-like semiconductor layer, in which a MOS transistor is formed, the MOS transistor has a drain region, and a source region that is positioned in the periphery of the drain region, an isolation trench which isolates the former island-like semiconductor layer from other portions of the semiconductor layer, an isolation trench which isolates the latter island-like semiconductor layer from other portions of the semiconductor layer, and a buffer region, in which the electric potential is fixed to the lowest electric potential in a circuit, which prevents an electrical interference occurred between transistors.
1. A semiconductor device comprising:
a semiconductor substrate;
a buried oxide film formed on said semiconductor substrate; and
a semiconductor layer formed on said buried oxide film,
wherein said semiconductor layer includes:
a first island-like semiconductor layer, in which a first MOS transistor of a first conductivity type is formed, the first MOS transistor having a) a first body region, b) a first source region that is positioned in said first body region, c) and a first drain region that is positioned in the periphery of said first body region;
a second island-like semiconductor layer, in which a second MOS transistor of a second conductivity type is formed, the second MOS transistor having a) a second drain region, b) a second body region that is positioned in the periphery of said second drain region, and c) a second source region that is positioned in said second body region;
a first isolation trench, positioned in the periphery of said first island-like semiconductor layer, which isolates said first island-like semiconductor layer from other portions of said semiconductor layer;
a second isolation trench, positioned in the periphery of said second island-like semiconductor layer, which isolates said second island-like semiconductor layer from other portions of said semiconductor layer; and
a buffer region, formed between said first isolation trench and said second isolation trench, which prevents an electrical interference occurred between the first MOS transistor and the second MOS transistor,
wherein an electric potential of said buffer region is fixed to one of a lowest electric potential or a highest electric potential in a circuit.
2. The semiconductor device according to claim 1 ,
wherein the first MOS transistor is a P-channel MOS transistor and the second MOS transistor is an N-channel MOS transistor, and
wherein the electric potential of said buffer region is fixed to the lowest electric potential in the circuit.
3. The semiconductor device according to claim 1 ,
wherein the first MOS transistor is the N-channel MOS transistor and the second MOS transistor is the P-channel MOS transistor, and
wherein the electric potential of said buffer region is fixed to the highest electric potential in the circuit.
4. The semiconductor device according to claim 1 ,
wherein said semiconductor layer further includes a drain buffer region between said first drain region and said first isolation trench, said drain buffer region with a lower concentration impurity than said first drain region.
5. The semiconductor device according to claim 1 ,
wherein said first drain region is adjacent to said first isolation trench in said semiconductor layer.