Method of manufacturing an orientation film using aerosol deposition on a seed substrate
View Patent ↗A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a ceramic film on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.
1. A method of manufacturing an orientation film, said method comprising the steps of:
(a) forming a film containing a raw material on a seed substrate, in which crystal orientation is controlled at least on a surface of said seed substrate, by using an aerosol deposition method of ejecting a powder comprising said raw material toward the substrate and depositing the powder on the substrate; and
(b) heat-treating the film formed at step (a) to form an orientation film in which crystal grains contained in said film are oriented,
wherein step (a) includes distributing raw material powder having different particle diameters in said film such that a particle diameter of the raw material powder in said film gradually becomes larger with distance from said seed substrate.
2. The method according to claim 1 , wherein step (a) includes adding a sintering auxiliary agent into said film.
3. The method according to claim 1 , wherein step (b) includes performing heat treatment in a sintering auxiliary agent atmosphere.
4. The method according to claim 1 , wherein said seed substrate includes a single crystal substrate.
5. The method according to claim 1 , wherein said seed substrate includes a silicon substrate and an epitaxial orientation film formed on said silicon substrate.
6. A method of manufacturing an orientation film, said method comprising the steps of:
(a) forming a film containing a raw material on a seed substrate, in which crystal orientation is controlled at least on a surface of said seed substrate, by using an aerosol deposition method of ejecting a powder comprising said raw material toward the substrate and depositing the powder on the substrate; and
(b) heat-treating the film formed at step (a) to form an orientation film in which crystal grains contained in said film are oriented,
wherein step (a) includes distributing a solid solution impurity for suppressing crystal grain growth in said film such that concentration of said solid solution impurity in said film gradually becomes higher with distance from said seed substrate.
7. A method of manufacturing an orientation film, said method comprising the steps of:
(a) forming a film containing a raw material on a seed substrate, in which crystal orientation is controlled at least on a surface of said seed substrate, by using an aerosol deposition method of ejecting a powder comprising said raw material toward the substrate and depositing the powder on the substrate; and
(b) heat-treating the film formed at step (a) to form an orientation film in which crystal grains contained in said film are oriented,
wherein step (a) includes distributing a sintering auxiliary agent for promoting crystal grain growth in said film such that concentration of said sintering auxiliary agent in said film gradually becomes lower with distance from said seed substrate.