Display device having an aluminum complex oxide on metal layer for improving corrosion resistance
View Patent ↗A thin film transistor substrate for a liquid crystal display device includes a substrate, a metal layer on the substrate, and an aluminum complex oxide layer on the metal layer. The aluminum complex oxide layer comprises at least one selected from the group consisting of zirconium, tungsten, chromium and molybdenum. A passivation layer is formed on the aluminum complex oxide layer through a dipping process.
1. A display device comprising: a substrate;
a metal layer formed on the substrate and including a top surface and a side surface, wherein the metal layer comprises aluminum or an aluminum alloy;
an insulating layer covering the metal layer; and
an aluminum complex oxide layer disposed between the top and side surfaces of the metal layer and the insulating layer, wherein the aluminum complex oxide layer is formed by applying to the metal layer a coating solution that comprises at least one selected from the group consisting of zirconium, tungsten, chromium and molybdenum.
2. The display device of claim 1 , wherein the insulating layer comprises a silicon nitride layer on the aluminum complex oxide layer.
3. The display device of claim 1 , wherein the metal layer comprises a gate line, a data line or both a gate line and a data line.