System and method for depositing a material on a substrate
View Patent ↗A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The mixture of vapor and carrier gas are remixed to achieve a uniform vapor/carrier gas composition, which is directed toward a surface of a substrate, such as a glass substrate, where the vapor is deposited as a uniform film.
1. A method for depositing material on a substrate, comprising:
introducing a material including a powder and a carrier gas into a first chamber including an interior, wherein the first chamber comprises a heater tube within the interior of the first chamber heated by resistive heating to a temperature high enough that at least a portion of the powder vaporizes into a vapor, and wherein the first chamber is permeable to vapor but impermeable to powder, to ensure that powder is unable to pass through the first chamber;
passing the vapor through the first chamber;
passing the vapor through at least one outlet connecting the first chamber to a second chamber, wherein the second chamber comprises a distribution manifold at least partially sheathing the first chamber;
directing a mixture of the vapor and carrier gas through a second chamber to form a substantially uniform vapor/carrier gas composition; and
directing the substantially uniform vapor/carrier gas composition through a plurality of distribution holes positioned in a line along the length of the second chamber, wherein the substantially uniform vapor/carrier gas composition is directed on a path formed by two external heating elements, wherein the path leads from the second chamber toward a surface of a substrate having a temperature lower than the vapor.
2. The method of claim 1 , wherein the material is heated in the first chamber by applying current to a component of the first chamber.
3. The method of claim 2 , wherein the material is a cadmium chalcogenide and heating includes maintaining the first chamber at a temperature of at least 500 degrees C.
4. The method of claim 3 , wherein the heating includes maintaining the first chamber at a temperature of at least 700 degrees C.
5. The method of claim 1 , wherein the external heating elements are heated by applying a current to the external heating elements.
6. The method of claim 1 , wherein the material is a cadmium chalcogenide and the external heating elements are maintained at a temperature of at least 500 degrees C.
7. The method of claim 1 , wherein the at least one outlet in the first chamber comprises a plurality of distribution holes.