Solar cell having doped semiconductor heterojunction contacts
View Patent ↗A silicon solar cell has doped amorphous silicon contacts formed on a tunnel silicon oxide layer on a surface of a silicon substrate. High temperature processing is unnecessary in fabricating the solar cell.
1. A solar cell comprising:
a) a single crystalline silicon substrate having first and second opposing major surfaces, wherein the first major surface is the light incident side;
b) a dielectric layer on the second surface, the dielectric layer comprising a tunnel oxide;
c) a first pattern of acceptor doped semiconductor material forming a plurality of emitters of a first type over the tunnel oxide on the second surface, a second pattern of donor doped semiconductor material forming a plurality of emitters of a second type over the tunnel oxide on the second surface and interleaved with the first pattern, and a dielectric layer lying over a portion of the first pattern and lying under a portion of the second pattern, wherein the semiconductor material is selected from the group consisting of silicon, silicon-germanium, and III-V compound semiconductors; and
d) a first conductive pattern interconnecting the acceptor doped semiconductor material and a second conductive pattern interconnecting the donor doped semiconductor material.
2. The solar cell as defined by claim 1 wherein the semiconductor material comprises amorphous silicon.
3. The solar cell as defined by claim 2 wherein the acceptor doped amorphous silicon is boron doped.
4. The solar cell as defined by claim 3 wherein the donor doped amorphous silicon is phosphorus doped.
5. The solar cell as defined by claim 4 wherein the first major surface is textured.
6. The solar cell as defined by claim 5 wherein the semiconductor body comprises silicon and the tunnel oxide comprises silicon oxide.
7. The solar cell as defined by claim 6 wherein the first and second conductive patterns are selected from the group consisting of aluminum and copper.
8. The solar cell as defined by claim 2 wherein the semiconductor body comprises silicon and the tunnel oxide comprises silicon oxide.
9. The solar cell as defined by claim 2 wherein the first and second conductive pattern are selected from the group consisting of aluminum and copper.
10. A method of fabricating a silicon solar cell, the method comprising:
a) providing a single crystalline silicon substrate having first and second opposing major surfaces, wherein the first major surface is the light incident side;
b) forming a dielectric layer on the second surface, wherein the dielectric layer comprises a tunnel silicon oxide;
c) forming a first pattern of acceptor doped semiconductor material for a plurality of emitters of a first type over the tunnel oxide on the second surface, forming a second pattern of donor doped semiconductor material for a plurality of emitters of a second type over the tunnel oxide on the second surface and interleaved with the first pattern, and forming a dielectric layer lying over a portion of the first pattern and lying under a portion of the second pattern, wherein the semiconductor material is selected from the group consisting of silicon, silicon-germanium, and III-V compound semiconductors; and
d) forming a first conductive pattern interconnecting the acceptor doped semiconductor material and a second conductive pattern interconnecting the donor doped semiconductor material.
11. The method of claim 10 wherein the semiconductor material is doped amorphous silicon and has dopant in excess of 10 19 atoms per cc of amorphous silicon.
12. The method of claim 11 wherein the donor dopant comprises phosphorus.
13. The method of claim 11 wherein the acceptor dopant comprises boron.
14. The method of claim 10 wherein the tunnel silicon oxide has thickness on the order of 10-20 angstroms.