Methods and structures for facilitating proximity communication
View Patent ↗One embodiment of the present invention provides an integrated chip module and a corresponding method of manufacture that facilitates proximity communication. This module includes a base chip and a bridge chip, both of which include an active face, upon which active circuitry and signal pads reside, and a back face opposite the active face. The active face of the bridge chip is bonded to the active face of the base chip, and the back face of the bridge chip is thinned via planarization or polishing.
1. A method for manufacturing a system that facilitates proximity communication between semiconductor chips, comprising:
thinning an identified portion of the active face of a bridge chip via etching;
bonding the bridge chip to a base chip, wherein the base chip and the bridge chip each include an active face upon which active circuitry and signal pads reside, and a back face opposite the active face, and wherein the active face of the bridge chip is bonded to the active face of the base chip; and
planarizing the back face of the bridge chip to thin the bridge chip and to remove the identified portion of the bridge chip, thereby creating an opening in the identified portion of the bridge chip that exposes a portion of the active face of the base chip.
2. The method of claim 1 , wherein planarizing the back face of the bridge chip involves planarizing the bridge chip after the bridge chip is bonded to the base chip.
3. The method of claim 1 , wherein planarizing the back face of the bridge chip involves planarizing the bridge chip before the bridge chip is bonded to the base chip.
4. The method of claim 1 , wherein the active face of the base chip communicates with a third device through the opening in the bridge chip.
5. The method of claim 4 , wherein the active face of the base chip receives power and ground through the opening and optionally communicates with other devices through the opening using:
a solder bump array;
an optical fiber;
a rigid-flex cable;
a ceramic substrate;
an organic substrate; and/or
a silicon substrate.
6. The method of claim 1 , wherein planarizing the back face of the base chip increases the compliance of the portion of the bridge chip used for proximity communication.
7. The method of claim 6 , wherein the method further comprises etching a pit in the bridge chip to facilitate alignment with a neighboring chip for proximity communication.