Method for manufacturing semiconductor device, and method and structure for implementing semicondutor device
View Patent ↗A method for manufacturing a semiconductor device includes forming an electrode; forming a projection projecting with respect to the electrode by melting a resin; and providing a conductive layer electrically connected to the electrode. The conductive layer is extended to an upper surface of the projection. Therefore, productivity of the semiconductor is improved.
1. A method for implementing a semiconductor device, the semiconductor device including an electrode, a projection that is formed of a first resin and projects with respect to the electrode, and a conductive layer that is electrically connected to the electrode and covers an upper surface of the projection, the method comprising:
preparing a second resin having a curing temperature which is lower than a glass transition temperature of the first resin by no less than 30 degrees Celsius; and
implementing the semiconductor device on a mounting substrate with a joint material formed of the second resin arranged between the semiconductor device and the mounting substrate through heating and pressurization.
2. The method according to claim 1 , wherein the projection has a semicircular cross-sectional shape.
3. The method according to claim 1 , wherein the first resin has a glass transition temperature which is not less than 270 degrees Celsius.
4. The method according to claim 1 , wherein the first resin is phenol resin or polyimide resin.
5. The method according to claim 1 , wherein the second resin is epoxy resin.
6. The method according to claim 1 ,
wherein the electrode is one of a plurality of adjacently arranged electrodes,
wherein the projection is formed to straddle the electrodes,
wherein the conductive layer is one of a plurality of conductive layers that are provided on an upper surface of the projection in correspondence with the electrodes, and
wherein each of the conductive layers is electrically connected to a corresponding one of the electrodes.
7. The method according to claim 1 , wherein the joint material is a non-conductive joint material.
8. A method for implementing a semiconductor device on a mounting substrate, comprising:
forming a projection that projects with respect to an electrode provided in the semiconductor device using a first resin;
providing a conductive layer that is electrically connected to the electrode and covers the projection;
forming a joint material using a second resin having a curing temperature which is lower than a glass transition temperature of the first resin by no less than 30 degrees Celsius;
arranging the joint material between the semiconductor device and the mounting substrate; and
performing heating and pressurization on the joint material, the semiconductor device, and the mounting substrate with the joint material located between the semiconductor device and the mounting substrate.