Forming electrodes to small electronic devices having self-assembled organic layers
View Patent ↗In one embodiment of the invention, a method of fabricating a SAM device comprises the steps of: (a) providing a substrate having a top surface and a first metal electrode disposed on the top surface, (b) annealing the first metal electrode, (c) forming a SAM layer on a major surface of the first electrode, the SAM layer having a free surface such that the SAM is disposed between the free surface and the major surface of the first electrode, and (d) forming a second metal electrode on the free surface of the molecular layer. Forming step (d) includes the step of (d 1 ) depositing the second metal electrode in at least two distinct depositions separated by an interruption period of time when essentially no deposition of the second metal takes place. SAM FETs fabricated using this method are also described.
1. Apparatus comprising
a substrate having a top surface and first metal electrode disposed on at least a portion of said top surface,
a self-assembled molecular layer disposed on a major surface of said first metal electrode, said molecular layer having a free surface, and
a second metal electrode having at least a portion thereof disposed on said free surface of said molecular layer, said portion of second metal electrode including metal clusters.
2. The apparatus of claim 1 , wherein said first metal electrode has an annealed crystal structure.
3. The apparatus of claim 2 , wherein said first electrode has a larger average grain size than non-annealed metal layers of the same composition and same dimension.
4. The apparatus of claim 1 , wherein said first electrode, molecular layer and second electrode form a stack along a direction substantially perpendicular to said portion of said top surface.
5. The apparatus of claim 1 , wherein said apparatus comprises a diode or a transistor having a channel, said molecular layer forming said channel.
6. The apparatus of claim 5 , wherein said second metal electrode comprises Au and said molecular layer comprises a fully saturated molecule.