Semiconductor device, electronic apparatus, method of manufacturing semiconductor device, and method of manufacturing electronic apparatus
View Patent ↗A semiconductor device includes first and second electrodes disposed apart from each other on a substrate, a gate electrode disposed so as to face the first and second electrodes and to cover at least part of each of the first and second electrodes, a semiconductor layer disposed between the first and second electrodes and the gate electrode, and a gate insulating layer disposed between the gate electrode and the semiconductor layer, the gate insulating layer having a film thickness that is greater in portions located directly above areas where the first and second electrodes are under the gate electrode than in a portion located directly above an area between the first and second electrodes.
1. A semiconductor device, comprising:
first and second electrodes disposed apart from each other on a substrate;
a gate electrode disposed so as to face the first and second electrodes and to cover at least part of each of the first and second electrodes, the gate electrode being substantially ovular in shape;
a semiconductor layer disposed between the first and second electrodes and the gate electrode; and
a gate insulating layer disposed between the gate electrode and the semiconductor layer;
the gate insulating layer having a film thickness that is greater in portions located directly above areas where the first and second electrodes are under the gate electrode than in a portion located directly above an area between the first and second electrodes.
2. The semiconductor device of claim 1 , wherein a portion of the semiconductor layer formed between the first and second electrodes is a channel region.
3. The semiconductor device of claim 1 , wherein the gate insulating layer is formed to have a film thickness that gradually increases from the portion located directly above an area between the first and second electrodes towards the portions located directly above areas where the first and second electrodes are under the gate electrode.
4. An electronic apparatus comprising the semiconductor device of claim 1 .
5. The semiconductor device of claim 1 , wherein the gate electrode has metal particulates, surfaces of the metal particulates being modified with an organic matter.
6. A semiconductor device, comprising:
first and second electrodes formed on a substrate;
a semiconductor layer formed to cover an area between the first and second electrodes on the first and second electrodes;
a gate insulating layer formed on the semiconductor layer; and
a gate electrode formed on the gate insulating layer, the gate electrode being substantially ovular in shape;
the gate electrode having portions that are directly above the first and second electrodes, and
the gate insulating layer having a film thickness that is greater in portions located directly above areas where the first and second electrodes are under the gate electrode than in a portion located directly above an area between the first and second electrodes.
7. The semiconductor device of claim 6 , wherein the gate electrode has metal particulates, surfaces of the metal particulates being modified with an organic matter.
8. A method of manufacturing a semiconductor device, comprising:
forming a first and second electrodes that are disposed apart from each other on a substrate;
forming a semiconductor layer in an area between the first and second electrodes and on the first and second electrodes;
forming a gate insulating layer so as to cover the semiconductor layer; and
forming a gate electrode layer on the gate insulating layer, the gate electrode being substantially ovular in shape and covering at least part of each of the first and second electrodes;
the gate insulating layer being formed to have a film thickness that is greater in portions located directly above areas where the first and second electrodes are under the gate electrode than in a portion located directly above an area between the first and second electrodes.
9. The method of manufacturing a semiconductor device of claim 8 , wherein the step of forming a gate insulating layer includes
providing a liquid material in which a gate insulating layer material is dissolved in a solvent on the semiconductor layer to form a coated film, and
removing the solvent from the coated film.
10. The method of manufacturing a semiconductor device of claim 9 , wherein the step of removing the solvent from the coated film adjusts a drying rate at an end of the coated film to be faster than a drying rate in a portion other than the end.
11. The method of manufacturing a semiconductor device of claim 9 , wherein prior to the step of forming the gate insulating layer, a treatment to reduce a contact angle with respect to the liquid material in an area to be provided with the liquid material is performed.
12. The method of manufacturing a semiconductor device of claim 9 , wherein prior to the step of forming the gate insulating layer, a surface tension adjuster is added to the liquid material to reduce a contact angle with respect to the liquid material in an area to be provided with the liquid material.
13. The method of manufacturing a semiconductor device of claim 9 , wherein the liquid material is discharged from a droplet discharge device and is provided to the semiconductor layer.
14. A method of manufacturing an electronic apparatus using the method of manufacturing a semiconductor device of claim 8 .