Molybdenum-based electrode with carbon nanotube growth
A carbon nanotube is formed on at least one Molybdenum-based electrode. In one embodiment, a carbon-nanotube device includes a pair of Molybdenum-based electrodes over respective terraces. Using a catalyst on the Molybdenum-based material of at least one electrode, a carbon nanotube is grown over a gap that separates the terraces to connect the Molybdenum-based electrodes. Yet other aspects of the present invention employ carbon nanotubes extending (suspended) from respective Molybdenum-based structures for use in electrically addressable devices. The nanotubes can also be formed by patterned growth to bridge such Molybdenum-based electrodes. A particular method for manufacturing this device does not require post-growth processing. Applications include, among many others, scalable nanotube transistors/switches nano-electromechanical systems.
1 . An arrangement for forming a carbon-nanotube device, the arrangement comprising:
a substrate;
first and second silicon-based terraces over the substrate and an either side of a gap separating the first silicon-based terrace from the second silicon-based terrace;
a first Molybdenum-based material covering at least a portion of the first silicon-based terrace;
a second Molybdenum-based material covering at least a portion of the second silicon-based terrace, the first and second Molybdenum-based materials forming respective surfaces for supporting a carbon nanotube structure that forms an electrical connection between the Molybdenum-based materials.
2 . The arrangement of claim 1 , further including the carbon-nanotube structure electrically connecting between the Molybdenum-based materials.
3 . The arrangement of claim 2 , further including a catalyst material over the Molybdenum-based material and under the carbon-nanotube structure at each terrace.
4 . A method for manufacturing a carbon-nanotube device, the method comprising:
forming at least one electrode including Molybdenum on a substrate; and
growing a carbon nanotube extending from the at least one electrode.
5 . The method of claim 4 , wherein growing a carbon nanotube includes growing a single-walled carbon nanotube using chemical-vapor deposition (CVD).
6 . The method of claim 5 , wherein growing a carbon nanotube includes growing a single-walled carbon nanotube in an environment having a temperature of at least about 700 degrees Celsius.
7 . The method of claim 5 , wherein growing a carbon nanotube includes growing a single-walled carbon nanotube in an environment comprising hydrogen gas.
8 . A method for manufacturing a carbon-nanotube device, the method comprising:
sputtering Molybdenum onto an insulative substrate;
patterning a photoresist mask over the sputtered Molybdenum;
using the patterned photoresist mask, etching the sputtered Molybdenum to form at least two Molybdenum electrodes;
forming a catalyst material on at least one of the Molybdenum electrodes; and
using chemical vapor deposition (CVD), growing a single-walled carbon nanotube extending from the catalyst material and connecting the Molybdenum electrodes.
9 . The method of claim 8 , wherein growing a single-walled carbon nanotube includes growing the single-walled carbon nanotube in an environment comprising hydrogen and having a temperature of at least about 700 degrees Celsius.
10 . A system for manufacturing a carbon-nanotube device, the system comprising:
means for forming at least one electrode including Molybdenum on a substrate; and
means for growing a carbon nanotube extending from the at least one electrode.