Method of manufacturing semiconductor device, semiconductor device, display device, and electronic instrument
View Patent ↗A method of manufacturing a semiconductor device includes: forming a plurality of regions extending in a predetermined direction on a substrate; and ejecting a liquid material on the plurality of regions to form an electrically conductive film, wherein the electrically conductive film extends in the same direction as the plurality of regions so as to overlap the plurality of regions.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a source electrode and a drain electrode on a substrate;
forming a semiconductor layer on the source and the drain electrode;
forming a gate insulating layer on the semiconductor layer;
forming a plurality of first regions extending in a predetermined direction on the gate insulating layer;
forming a plurality of second regions on the gate insulating layer, the plurality of first regions and the plurality of second regions being formed alternatively, the plurality of second regions being more lyophilic than the plurality of first regions; and
ejecting a liquid material on the plurality of first and second regions, the liquid material being formed overlapping the plurality of first regions.
2. A method of manufacturing a semiconductor device, comprising:
forming a first region, a second region, and a third region in a first film, the forming of the first region and the third region including forming the first region and the third region by a physical treatment, the second region being positioned between the first region and the third region, the first region and the third region being formed to cause anisotropy in an extending direction of a liquid material; and
depositing the liquid material on the first region, the second region, and the third region to form an electrically conductive film.
3. The method of manufacturing the semiconductor device according to claim 2 , the physical treatment including a rubbing method.
4. The method of manufacturing the semiconductor device according to claim 2 , the first region and the third region being grooves.
5. The method of manufacturing the semiconductor device according to claim 4 , the grooves have a depth in a range of 0.1 through 1000 nm.
6. The method of manufacturing the semiconductor device according to claim 2 , the first film being made of an organic polymeric material.
7. The method of manufacturing the semiconductor device according to claim 2 , further comprising:
reducing a wettability of a surface of the first film before the forming of the first region and the third region.
8. A method of manufacturing a semiconductor device, comprising:
depositing a lyophobic material on a first film in a direction in which an electrically conductive film is to be formed, the first film having a first portion with the lyophobic material, a second portion without the lyophobic material and a third portion with the lyophobic material, the second portion being positioned between the first portion and the third portion; and
depositing a liquid material on the first portion, the second portion and the third portion to form the electrically conductive film.
9. The method of manufacturing the semiconductor device according to claim 8 , further comprising:
removing a portion of the lyophobic material that is formed on an area other than the electrically conductive film is to be formed before the depositing of the liquid material.
10. The method of manufacturing the semiconductor device according to claim 8 , further comprising:
conducting a physical treatment before the depositing of the lyophobic material on the first film.
11. A method of manufacturing a semiconductor device, comprising:
forming a source electrode and a drain electrode on a substrate;
forming a semiconductor film above the source electrode and the drain electrode;
forming an insulating film above the semiconductor film, the insulating film being formed to have a first region, a second region, and a third region, the second region being positioned between the first region and the third region, the first region and the third region being formed to cause anisotropy in an extending direction of a liquid material; and
depositing liquid material on the first region, the second region, and the third region to form a gate electrode.
12. The method of manufacturing the semiconductor device according to claim 11 , the forming of the first region and the third region including forming the first region and the third region by a physical treatment that includes a transfer method.
13. The method of manufacturing the semiconductor device according to claim 11 , the forming of the first region and the third region including depositing a lyophobic material on the first region and the third region.
14. A method of manufacturing a semiconductor device, comprising:
forming a first region, a second region, and a third region in a first film made of an organic polymeric material, the second region being positioned between the first region and the third region, the first region and the third region being formed to cause anisotropy in an extending direction of a liquid material; and
depositing the liquid material on the first region, the second region, and the third region to form an electrically conductive film.