Semiconductor device production method and semiconductor device
View Patent ↗A semiconductor device production method including: the step of forming a stopper mask layer of a first metal on a semiconductor substrate, the stopper mask layer having an opening at a predetermined position thereof; the metal supplying step of supplying a second metal into the opening of the stopper mask layer to form a projection electrode of the second metal; and removing the stopper mask layer after the metal supplying step.
1. A semiconductor device comprising:
an active layer provided in one surface of a semiconductor substrate;
a projection electrode of a metal electrically connected to the active layer, the projection electrode having a flat top surface and a generally uniform width throughout a length direction thereof from the active layer to a distal end of the projection electrode, and extending generally perpendicularly to the semiconductor substrate;
a protective film provided over the active layer with at least a proximal half portion of the projection electrode being embedded therein and with a distal portion of the projection electrode being exposed therefrom, the protective film comprising an oxide with an elastic modulus of at least 1.5 GPa;
a device electrode pad, the projection electrode and the active layer being electrically connected via the device electrode pad; and
a seed layer provided only between the device electrode pad and the projection electrode,
wherein the semiconductor device is a completed device and is configured to be connected by flip-chip connection.
2. A semiconductor device as set forth in claim 1 , further comprising a barrier metal layer provided between the projection electrode and the device electrode pad.
3. A semiconductor device as set forth in claim 2 , further comprising a diffusion prevention film provided along a side face of said projection electrode, to prevent diffusion of a metal element across said barrier metal layer.
4. A semiconductor device as set forth in claim 1 , wherein the semiconductor device is connected to another semiconductor device having another projection electrode provided in association with the projection electrode so as to form a chip-on-chip connection.
5. A semiconductor device as set forth in claim 1 , wherein the semiconductor device is connected to a board electrode pad provided on a wiring board so as to form a flip-chip connection.
6. A semiconductor device as set forth in claim 1 , wherein the distal portion of the projection electrode protrudes through an opening in the protective film.
7. A semiconductor device as set forth in claim 1 , wherein the projection electrode comprises gold.
8. A semiconductor device comprising:
an active layer provided in one surface of a semiconductor substrate;
a projection electrode of a metal electrically connected to the active layer, the projection electrode having a generally uniform width throughout a length direction thereof from the active layer to a distal end of the projection electrode, and extending generally perpendicularly to the semiconductor substrate; and
a protective film provided over the active layer with at least a proximal half portion of the projection electrode being embedded therein and with a distal portion of the projection electrode being exposed therefrom, the protective film comprising an oxide with an elastic modulus of at least 1.5 GPa;
wherein the semiconductor device is a completed device and is configured to be connected by flip-chip connection.
9. A semiconductor device as set forth in claim 8 , further comprising a device electrode pad, the projection electrode and the active layer being electrically connected via the device electrode pad.
10. A semiconductor device as set forth in claim 9 , further comprising a barrier metal layer provided between the projection electrode and the device electrode pad.
11. A semiconductor device as set forth in claim 10 , further comprising a diffusion prevention film provided along a side face of said projection electrode, to prevent diffusion of a metal element across said barrier metal layer.
12. A semiconductor device as set forth in claim 8 , wherein the semiconductor device is connected to another semiconductor device having another projection electrode provided in association with the projection electrode so as to form a chip-on-chip connection.
13. A semiconductor device as set forth in claim 9 , wherein the semiconductor device is connected to a board electrode pad provided on a wiring board so as to form a flip-chip connection.
14. A semiconductor device as set forth in claim 8 , wherein the distal portion of the projection electrode protrudes through an opening in the protective film.
15. A semiconductor device as set forth in claim 8 , wherein the projection electrode comprises gold.