Method of fabricating a substrate with a concave surface
View Patent ↗Bending generated in a side of a device mounting surface of an organic resin substrate after an assembly process for a semiconductor device is inhibited, thereby providing an improved production yield. A semiconductor device 100 is formed by solder-joining a semiconductor chip 105 onto a device mounting surface 111 of an interposer that is composed of an organic resin substrate 101 . The interposer is an interposer, which is composed of an organic resin substrate 101 , and on one surface of which a semiconductor chip 105 is to be mounted, and has a convex curvature in a side of a back surface 113 opposite to the device mounting surface 111 , in a condition before an assembling process for the semiconductor device 100.
1. A method for manufacturing a semiconductor device, comprising:
forming a concave surface on an organic resin substrate by bending the organic resin substrate so as to provide a concave curvature in a side of a device mounting surface of the organic resin substrate; and wherein said forming the concave surface includes joining a stiffener onto a device mounting surface of said organic resin substrate to form a multiple-layered member, and forming said concave surface in said multiple-layered member
joining a semiconductor device to said organic resin substrate by disposing said semiconductor device on said concave surface and then heating thereof;
wherein, in said joining the semiconductor device, said concave surface is stretched to provide a planarized surface.
2. The method for manufacturing the semiconductor device according to claim 1 , further comprising forming an underfill layer between said semiconductor device and said organic resin substrate,
wherein, in said joining the semiconductor device and in said forming the underfill layer, said concave surface is stretched to provide a planarized surface.
3. The method for manufacturing the semiconductor device according to claim 1 , further comprising previously acquiring a bending level for bending the substrate when said organic resin substrate is thermally processed at a predetermined temperature, wherein said organic resin substrate is bent depending on said bending level occurred in said forming the concave surface.
4. The method for manufacturing the semiconductor device according to claim 1 , wherein said forming the concave surface includes:
preparing a first jig comprising a concave portion corresponding to a geometry of said concave surface and a second jig comprising a convex portion corresponding to a geometry of said concave portion; and
disposing said organic resin substrate between said first jig and said second jig and pressing said first jig and said second jig against said organic resin substrate to form said concave surface.
5. The method for manufacturing the semiconductor device according to claim 1 , wherein said joining the semiconductor device includes joining said organic resin substrate to said semiconductor device with lead free solder.