Plasmon tomography
View Patent ↗Plasmon energy is produced by exciting a plasmon resonance at least one excitation position on a first surface of a first material, and the plasmon energy is detected at at least one measurement position on the first surface after the plasmon energy has propagated from the at least one excitation position to the at least one measurement position. An attenuation of plasmon energy is determined along a plurality of paths between the at least one excitation position and the at least one measurement position, and relative distances between the first surface and a second surface of a second material are determined at a plurality of points on at least one of the surfaces based on the determined attenuation of plasmon energy along the plurality of paths.
1. A method comprising:
producing plasmon energy by exciting a plasmon resonance at least one excitation position on a first surface of a first material facing a second surface of a second material, wherein the plasmon energy propagates to a measurement position along the first surface;
detecting an amount of plasmon energy at the measurement position on the first surface after the plasmon energy has propagated from the excitation position to the measurement position; and
adjusting a relative position between the first and second surfaces based on the amount of plasmon energy detected at the measurement position.
2. The method of claim 1 , wherein the second material comprises a semiconductor material.
3. The method of claim 1 , wherein the first material comprises a patterned mask.
4. The method of claim 1 , further comprising:
providing the first material having the first surface; and
providing the second material having the second surface facing the first surface.
5. The method of claim 1 , further comprising producing plasmon energy by exciting a plasmon resonance at the at least one excitation position on the first surface, detecting an amount of plasmon energy at the measurement position on the first surface after the plasmon energy has propagated from the excitation position to the measurement position, and adjusting a relative position between the first and second surfaces based on the amount of plasmon energy detected at the measurement position until the amount of plasmon energy detected at the measurement position is substantially equal to a desired amount of plasmon energy.
6. The method of claim 1 , wherein the first surface includes a first deformity and wherein the second surface includes a second deformity.
7. The method of claim 6 , wherein the first deformity and the second deformity are protrusions from the surfaces.
8. The method of claim 1 , wherein the first surface includes a first deformity and wherein the second surface includes a second deformity and wherein the first deformity and the second deformity are aligned along a direction substantially perpendicular to the first and second surfaces when the detected amount of plasmon energy is substantially equal to a desired amount of plasmon energy.
9. An apparatus comprising:
positioning structures configured to align a first surface of a first material with a second surface of a second material;
an optical energy source, wherein the source is alignable to provide electromagnetic radiation at a frequency operative to excite a plasmon resonance at least one excitation position on the first surface of the first material wherein plasmon energy propagates to at least one measurement position along the first surface that is spatially separated from the at least one excitation position; and
a detector configured to produce a signal corresponding to propagated plasmon energy measured at the at least one measurement position on the first surface spatially separated from the at least one excitation position;
wherein the positioning structures are configured to adjust a relative position between the first and second surfaces in response to the signal.
10. The apparatus of claim 9 , wherein the positioning structures comprise:
a movable stage configured to align the first surface with the second surface; and
the apparatus can further include a processor configured to process the signal corresponding to excited plasmon energy to provide a signal to the movable stage to move the first or second surfaces into an alignment position with the other of the first or second surface.
11. The apparatus of claim 9 , wherein the second material comprises a semiconductor material.
12. The apparatus of claim 9 , wherein the first material comprises a patterned mask.
13. The apparatus of claim 9 , wherein the first surface includes a first deformity and wherein the second surface includes a second deformity.
14. The apparatus of claim 13 , wherein the first deformity and the second deformity are protrusions from the surfaces.
15. The apparatus of claim 13 , wherein
the detector is configured to produce a signal corresponding to an amount of excited plasmon energy at the at least one measurement position on the first surface,
wherein the positioning structures are configured to align the first deformity and the second deformity along a direction substantially perpendicular to the first and second surfaces when the detected amount of plasmon energy is substantially equal to a desired amount of plasmon energy.
16. The apparatus of claim 9 , wherein the detector comprises a coupler adapted for coupling plasmon energy at the at least one measurement position into an electromagnetic wave.
17. The apparatus of claim 16 , wherein the coupler comprises a diffraction grating.