Large-area nanoenabled macroelectronic substrates and uses therefor
View Patent ↗A method and apparatus for an electronic substrate having a plurality of semiconductor devices is described. A thin film of nanowires is formed on a substrate. The thin film of nanowires is formed to have a sufficient density of nanowires to achieve an operational current level. A plurality of semiconductor regions are defined in the thin film of nanowires. Contacts are formed at the semiconductor device regions to thereby provide electrical connectivity to the plurality of semiconductor devices. Furthermore, various materials for fabricating nanowires, thin films including p-doped nanowires and n-doped nanowires, nanowire heterostructures, light emitting nanowire heterostructures, flow masks for positioning nanowires on substrates, nanowire spraying techniques for depositing nanowires, techniques for reducing or eliminating phonon scattering of electrons in nanowires, and techniques for reducing surface states in nanowires are described.
1. A method of making a thin film for use in one or more semiconductor devices, comprising:
(A) forming a first plurality of nanowires that are p-type;
(B) forming a second plurality of nanowires that are n-type, wherein said forming comprises doping said second plurality of nanowires with an n-type dopant;
(C) depositing the first plurality of nanowires on a first region of a substrate and second plurality of nanowires onto a second separate, non-overlapping region of the substrate to form a thin film of nanowires that includes n-type and p-type nanowires; and
(D) allowing the mixture of n-type and p-type nanowires to become immobilized on the substrate,
whereby the thin film of nanowires exhibits characteristics of both n-type and p-type nanowires.
2. The method of claim 1 , further comprising:
(E) forming at least first and second pairs of electrical contacts in the first and second regions of the substrate;
wherein step (D) comprises allowing the n-type and p-type nanowires to immobilize in contact with respective ones of the first and second pair of electrical contacts.
3. The method of claim 1 , wherein step (C) comprises:
(1) depositing the first plurality of nanowires on the substrate to form a first sublayer of the thin film of nanowires; and
(2) depositing the second plurality of nanowires on the first sublayer to form a second sublayer of the thin film of nanowires on the first sublayer.
4. The method of claim 1 , wherein step (C) comprises:
(1) depositing the second plurality of nanowires on the substrate to form a first sublayer of the thin film of nanowires; and
(2) depositing the first plurality of nanowires on the first sublayer to form a second sublayer of the thin film of nanowires on the first sublayer.
5. The method of claim 1 , wherein step (C) comprises:
mixing the first plurality of nanowires and the second plurality of nanowires; and
depositing the mixed first plurality and second plurality of nanowires onto the substrate to form the thin film of nanowires.
6. The method of claim 1 , wherein said steps (A) and (B) each comprise:
doping a core of the nanowires.
7. The method of claim 1 , wherein said steps (A) and (B) each comprise:
doping a shell of the nanowires.
8. The method of claim 1 , wherein said steps (A) and (B) each comprise:
doping a core and a shell of the nanowires.
9. The method of claim 1 , wherein both of steps (A) and (B) are performed prior to step (C).
10. A method of making a thin film for use in one or more semiconductor devices, comprising:
(A) forming a first plurality of nanowires that are p-doped;
(B) forming a second plurality of nanowires that are n-doped;
(C) depositing the first plurality of nanowires on a first region of the substrate and a second plurality of nanowires on a second region of the substrate to form a thin film of nanowires that includes n-doped and p-doped nanowires;
wherein the thin film of nanowires includes regionally segregated n-doped and p-doped nanowires on the substrate.
11. A semiconductor device having operational characteristics of n- and p-type materials, comprising:
a substrate;
at least a pair of electrical contacts formed on a first region of the substrate and at least a second pair of electrical contacts formed on a second seperate, non-overlapping region of the substrate; and
a thin film of n-type nanowires adhering to the substrate in contact with the first pair of electrical contacts and p-type nanowires adhering to the substrate in contact with the second pair of electrical contacts, wherein at least one of said p-type nanowires and said n-type nanowires comprises nanowires having a core that is doped with a dopant and one or more shell layers deposited on the core.
12. The semiconductor device of claim 11 , wherein the thin film n-type and p-type nanowires comprises:
a first sublayer that includes a plurality of n-type nanowires; and
a second sublayer that includes a plurality of p-type nanowires.
13. The method of claim 11 , wherein said one or more shell layers comprises an oxidized shell layer.
14. The method of claim 13 , wherein said core comprises silicon and said shell comprises a silicon oxide.