Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device includes: a semiconductor substrate; a gate insulating film formed on the semiconductor substrate and made of a high-dielectric-constant material composed of a plurality of layers stacked perpendicularly to a principal surface of the semiconductor substrate and associated with respective phases; and a gate electrode formed on the gate insulating film.
1. A method for fabricating a semiconductor device, the method comprising the steps of:
forming, by atomic layer deposition, a gate insulating film made of a plurality of high-dielectric-constant thin films at a thermodynamically-stable atomic-layer ratio and having different dielectric constants, on a semiconductor substrate; and
forming a gate electrode on the gate insulating film,
wherein the gate insulating film is composed of phases stacked perpendicularly to a principal surface of the semiconductor substrate;
wherein in the step of forming the gate insulating film, each of the high-dielectric-constant thin films is deposited at a temperature at which an amorphous state of the high-dielectric-constant thin film is maintained, and
the method further comprises the step of performing a heat treatment on the gate insulating film at a temperature enough to make each of the phases stable, before the step of forming the gate electrode, and
performing nitridation on the gate insulating film, between the step of performing the heat treatment at a temperature at which the phases are stable and the step of forming the gate electrode.
2. The method for fabricating the semiconductor device of claim 1 , wherein in the gate insulating film, one of the layers associated with a first stable phase having a low dielectric constant is located on the semiconductor substrate.
3. The method for fabricating the semiconductor device of claim 1 , wherein in the gate insulating film, one of the layers associated with a first stable phase having a low dielectric constant is located on the gate electrode.
4. The method for fabricating the semiconductor device of claim 1 , wherein the gate electrode is made of polysilicon, and
the high-dielectric-constant material contains at least one material selected from the group consisting of silicon, germanium, hafnium, zirconium, titanium, tantalum, aluminum and a rare-earth metal.
5. The method for fabricating the semiconductor device of claim 1 , wherein the high-dielectric-constant material is made of hafnium silicate (HfxSi1-xO4),
a Hf concentration x of the first stable phase is 0.1<x<0.4, and
a Hf concentration x of a second stable phase associated with another layer in the gate insulating film is 0.5 or 1.0.