IP Library Patent Application 11412919
Patent Application
App. No. 11/412,919

Method and system for forming periodic pulse patterns

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Quick Facts
Patent No.
US None
App. No.
11/412,919
Abstract

A system for forming a periodic pulse pattern in a sample includes a movable stage having the sample loaded thereon, a pulse laser for generating a laser beam of pulses, an objective lens for focusing the laser beam to the sample to form a pattern of pulses in the sample, and a controller for adjusting the movement speed of the movable stage to set a period of the pulse pattern. The pulse pattern includes a spot pattern or a line pattern made by a slit provided between the pulse laser and the objective lens.

Claims (27)

1 . A system for forming a periodic pulse pattern in a sample, comprising:

a movable stage having the sample loaded thereon;

a pulse laser for generating a laser beam of pulses;

means for focusing the laser beam to the sample to form a pattern of pulses in the sample; and

a controller for adjusting the movement speed of the movable stage to set a period of the pulse pattern.

2 . The system of claim 1 , wherein the pulse pattern includes a spot pattern.

3 . The system of claim 1 , wherein the pulse pattern includes a line pattern.

4 . The system of claim 2 , wherein said focusing means includes:

an objective lens for focusing the pulse laser beam in a form of a circular spot to the sample, to thereby form the spot pattern in the sample.

5 . The system of claim 3 , wherein said focusing means includes:

a slit for transforming the pulse laser beam into a form of a slit beam; and

an objective lens for focusing the slit beam in a form a line to the sample, to thereby form the line pattern formed in the sample.

6 . The system of claim 1 , wherein the sample is selected from a group including a silica, glass, metal, polymer and LithiumNiobate (LiNbO 3 ).

7 . The system of claim 1 , wherein the pulse laser includes an ultrahigh speed femtosecond laser.

8 . The system of claim 4 , wherein a size and a depth of the circular beam are set by adjusting a magnification and numerical aperture of the subject lens and adjusting power density of the pulse laser.

9 . The system of claim 5 , wherein a size and a depth of the slit beam are set by adjusting a magnification and numerical aperture of the beam focusing lens and adjusting power density of the pulse laser.

10 . The system of claim 1 , wherein the periodic pattern is formed on a surface of or inside the sample depending on a focal depth.

11 . A method for forming a periodic pulse pattern in a sample, comprising the steps of:

loading the sample on a movable stage;

generating a laser beam of pulses from a pulse laser;

focusing the laser beam to the sample using a beam focusing lens; and

adjusting the movement speed of the movable stage so that the laser beam is scanned in the sample, to thereby form the periodic pulse pattern in the sample.

12 . The method of claim 11 , wherein the pulse pattern includes a spot pattern.

13 . The method of claim 11 , wherein the pulse pattern includes a line pattern.

14 . The method of claim 12 , wherein a size and a depth of the spot pattern are set through adjusting a magnification and numerical aperture of the beam focusing lens and adjusting power density of the pulse laser.

15 . The method of claim 13 , wherein a size and a depth of the slit pattern are set through adjusting a magnification and numerical aperture of the beam focusing lens and adjusting power density of the pulse laser.

16 . The method of claim 11 , wherein the periodic pattern is formed on a surface of or inside the sample depending on a focal depth.

Assignments (2)
MERGER Recorded Oct 1, 2009
From: RESEARCH AND INDUSTRIAL COOPERATION GROUP, INFORMATION AND COMMUNICATIONS UNIVERSITY
To: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (KAIST)
Reel/Frame 023312/0614 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 28, 2006
From: SOHN, IK BU; LEE, MAN SEOP
To: RESEARCH AND INDUSTRIAL CORPORATION GROUP
Reel/Frame 017840/0400 →