IP Library Granted Patent US 7,687,226
Granted Patent B2
US 7,687,226 · App. 11/415,280 · Granted Mar 30, 2010

Method for fabricating printing plate with fine pattern using electric field

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Quick Facts
Patent No.
US 7,687,226
App. No.
11/415,280
Granted
Mar 30, 2010
Kind
B2
Abstract

A fabricating method of a printing plate includes forming a first conductive layer on an upper surface of a printing plate, forming a second conductive layer on a lower surface of the printing plate, forming an etch-resist pattern by etching a portion of the first conductive layer, submerging the printing plate, the second conductive layer and the etch-resist pattern into an electrolytic solution, and applying an electrical field between the etch-resist pattern and the second conductive layer so that the electrolytic solution is dissociated to form an anisotropically etched fine pattern in the printing plate.

Claims (18)

1. A fabricating method of a printing plate, comprising:

forming a first conductive layer on an upper surface of a printing plate;

forming a second conductive layer on a lower surface of the printing plate;

forming a first photo-resist layer on the first conductive layer;

forming a second photo-resist layer on the second conductive layer;

forming a first photo-resist pattern by etching a portion of the first photo-resist layer to form an opening in the first photo-resist layer exposing a first portion of the first conductive layer;

etching the first portion of the first conductive layer using the first photo-resist pattern as a mask so as to form a metal pattern exposing a portion of the printing plate;

forming a first contact hole in the first photo-resist pattern exposing a second portion of the metal pattern and forming a second contact hole in the second photo-resist layer exposing the second conductive layer to supply power to the metal pattern and the second conductive layer through the first and second contact holes;

submerging the printing plate having the second conductive layer, the metal pattern, the first photo-resist pattern and the second photo-resist layer into an electrolytic solution;

applying an electrical field between the metal pattern and the second conductive layer so that the electrolytic solution is dissociated to act to etch the printing plate in a vertical direction commensurate with the electric field so as to form an anisotropically etched pattern in the printing plate in which a width of the pattern is less than a depth of the pattern; and

removing the metal pattern, the first photo-resist pattern, the second conductive layer and the second photo-resist layer.

2. The fabricating method according to claim 1 , wherein the applying the electrical field between the metal pattern and the second conductive layer includes:

applying a negative potential to the metal pattern; and

applying a positive potential to the second conductive layer.

3. The fabricating method according to claim 1 , wherein the first and second conductive layers includes one of Cr, Mo, Cu and ITO.

4. The fabricating method according to claim 1 , wherein the electrolytic solution includes fluoric (F) ions capable of etching glass.

5. The fabricating method according to claim 1 , wherein the electrolytic solution includes one of HF, NH 4 F and KF.

6. The fabricating method according to claim 1 , wherein the printing plate is a glass.

Assignments (2)
CHANGE OF NAME Recorded Oct 27, 2008
From: LG.PHILIPS LCD CO., LTD.
To: LG DISPLAY CO., LTD.
Reel/Frame 021772/0701 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 2, 2006
From: KWON, OH NAM
To: LG.PHILIPS LCD CO., LTD.
Reel/Frame 017850/0866 →