Shielding of integrated circuit package with high-permeability magnetic material
View Patent ↗A device includes at least one ultra-small resonant structure; and shielding constructed and adapted to shield at least a portion of said ultra-small resonant structure with a high-permeability magnetic material. The magnetic material is formed from a substance selected from a non-conductive magnetic oxide such as a ferrite; a cobaltite, a chromite, and a manganite. The magnetic material may be mumetal, permalloy, Hipernom, HyMu-80, supermalloy, supermumetal, nilomag, sanbold, Mo-Permalloy, Ultraperm, or M-1040.
1. A method of making a device comprising:
forming an ultra-small resonant structure constructed and adapted to emit electromagnetic radiation (EMR) in response to excitation by a beam of charged particles; and
shielding at least a portion of said ultra-small resonant structure with a high-permeability magnetic material.
2. A method as in claim 1 wherein said magnetic material is formed from a substance selected from a non-conductive magnetic oxide.
3. A method as in claim 2 wherein the non-conductive magnetic oxide is selected from the group comprising: a ferrite; a cobaltite, a chromite, and a manganite.
4. A method as in claim 3 wherein the ferrite is selected from the group comprising: MnFe 2 O 4 , FeFe 2 O 4 , CoFe 2 O 4 , NiFe 2 O 4 , CuFe 2 O 4 , and MgFe 2 O 4 .
5. A method as in claim 1 wherein the magnetic material comprises a metal selected from the group comprising: mumetal, permalloy, Hipernom, HyMu-80, supermalloy, supermumetal, nilomag, sanbold, Mo-Permalloy, Ultraperm, and M-1040.
6. A method as in any one of claims 1 - 5 wherein said ultra-small resonant structure includes a source of charged particles.
7. A method as in claim 6 wherein said source of charged particles is selected from the group comprising:
an ion gun, a thermionic filament, tungsten filament, a cathode, a vacuum triode, a field emission cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.
8. A method as in claim 6 wherein the charged particles are selected from the group comprising: positive ions, negative ions, electrons, and protons.
9. A method as in claim 1 wherein the ultra-small resonant structure is constructed and adapted to emit at least one of visible light, infrared light, and ultraviolet light.
10. A method as in claim 1 wherein the ultra-small resonant structure is formed on a surface of an integrated circuit (IC).
11. A method as in claim 10 further comprising:
electrically connecting said ultra-small resonant structure to said IC.
12. A method as in claim 1 further comprising:
vacuum packaging at least said ultra-small resonant structure.
13. A device comprising:
at least one ultra-small resonant structure constructed and adapted to emit electromagnetic radiation (EMR) in response to excitation by a beam of charged particles; and
shielding constructed and adapted to shield at least a portion of said ultra-small resonant structure with a high-permeability magnetic material.
14. A device as in claim 13 wherein said magnetic material is formed from a substance selected from a non-conductive magnetic oxide.
15. A device as in claim 14 wherein the non-conductive magnetic oxide is selected from the group comprising: a ferrite; a cobaltite, a chromite, and a manganite.
16. A device as in claim 15 wherein the ferrite is selected from the group comprising: MnFe 2 O 4 , FeFe 2 O 4 , CoFe 2 O 4 , NiFe 2 O 4 , CuFe 2 O 4 , and MgFe 2 O 4 .
17. A device as in claim 13 wherein the magnetic material comprises a metal selected from the group comprising: mumetal, permalloy, Hipernom, HyMu-80, supermalloy, supermumetal, nilomag, sanbold, Mo-Permalloy, Ultraperm, and M-1040.
18. A device as in any one of claims 13 - 17 wherein said ultra-small resonant structure includes a source of charged particles.
19. A device as in claim 18 wherein said source of charged particles is selected from the group comprising:
an ion gun, a thermionic filament, tungsten filament, a cathode, a vacuum triode, a field emission cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.
20. A device as in claim 19 wherein the charged particles are selected from the group comprising: positive ions, negative ions, electrons, and protons.
21. A device as in claim 13 wherein the ultra-small resonant structure is constructed and adapted to emit at least one of visible light, infrared light, and ultraviolet light.
22. A device as in claim 13 wherein the ultra-small resonant structure is formed on a surface of an integrated circuit (IC).
23. A device as in claim 22 wherein the ultra-small resonant structure is electrically connected to said IC.
24. A device as in claim 13 wherein at least said ultra-small resonant structure is vacuum packaged.
25. A method of making a device comprising:
forming an ultra-small resonant structure constructed and adapted to detect electromagnetic radiation (EMR); and
shielding at least a portion of said ultra-small resonant structure with a high-permeability magnetic material.
26. A method as in claim 25 wherein said magnetic material is formed from a substance selected from a non-conductive magnetic oxide.
27. A method as in claim 26 wherein the non-conductive magnetic oxide is selected from the group comprising: a ferrite; a cobaltite, a chromite, and a manganite.
28. A method as in claim 27 wherein the ferrite is selected from the group comprising: MnFe 2 O 4 , FeFe 2 O 4 , CoFe 2 O 4 , NiFe 2 O 4 , CuFe 2 O 4 , and MgFe 2 O 4 .
29. A method as in claim 25 wherein the magnetic material comprises a metal selected from the group comprising: mumetal, permalloy, Hipernom, HyMu-80, supermalloy, supermumetal, nilomag, sanbold, Mo-Permalloy, Ultraperm, and M-1040.
30. A method as in any one of claims 25 - 29 wherein said ultra-small resonant structure includes a source of charged particles.
31. A method as in claim 30 wherein said source of charged particles is selected from the group comprising:
an ion gun, a thermionic filament, tungsten filament, a cathode, a vacuum triode, a field emission cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.
32. A method as in claim 30 wherein the charged particles are selected from the group comprising: positive ions, negative ions, electrons, and protons.
33. A method as in claim 25 wherein the ultra-small resonant structure is constructed and adapted to emit at least one of visible light, infrared light, and ultraviolet light.
34. A method as in claim 25 wherein the ultra-small resonant structure is formed on a surface of an integrated circuit (IC).
35. A method as in claim 34 further comprising:
electrically connecting said ultra-small resonant structure to said IC.
36. A method as in claim 25 further comprising:
vacuum packaging at least said ultra-small resonant structure.
37. A device comprising:
at least one ultra-small resonant structure constructed and adapted to detect electromagnetic radiation (EMR); and
shielding constructed and adapted to shield at least a portion of said ultra-small resonant structure with a high-permeability magnetic material.
38. A device as in claim 37 wherein said magnetic material is formed from a substance selected from a non-conductive magnetic oxide.
39. A device as in claim 38 wherein the non-conductive magnetic oxide is selected from the group comprising: a ferrite; a cobaltite, a chromite, and a manganite.
40. A device as in claim 39 wherein the ferrite is selected from the group comprising: MnFe 2 O 4 , FeFe 2 O 4 , CoFe 2 O 4 , NiFe 2 O 4 , CuFe 2 O 4 , and MgFe 2 O 4 .
41. A device as in claim 37 wherein the magnetic material comprises a metal selected from the group comprising: mumetal, permalloy, Hipernom, HyMu-80, supermalloy, supermumetal, nilomag, sanbold, Mo-Permalloy, Ultraperm, and M-1040.
42. A device as in any one of claims 37 - 41 wherein said ultra-small resonant structure includes a source of charged particles.
43. A device as in claim 42 wherein said source of charged particles is selected from the group comprising:
an ion gun, a thermionic filament, tungsten filament, a cathode, a vacuum triode, a field emission cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.
44. A device as in claim 43 wherein the charged particles are selected from the group comprising: positive ions, negative ions, electrons, and protons.
45. A device as in claim 37 wherein the ultra-small resonant structure is constructed and adapted to emit at least one of visible light, infrared light, and ultraviolet light.
46. A device as in claim 37 wherein the ultra-small resonant structure is formed on a surface of an integrated circuit (IC).
47. A device as in claim 46 wherein the ultra-small resonant structure is electrically connected to said IC.
48. A device as in claim 37 wherein at least said ultra-small resonant structure is vacuum packaged.