Electrostatic discharge protection semiconductor structure
View Patent ↗An electrostatic discharge (ESD) protection device with adjustable single-trigger or multi-trigger voltage is provided. The semiconductor structure has multi-stage protection semiconductor circuit function and adjustable discharge capacity. The single-trigger or multi-trigger semiconductor structure may be fabricated by using the conventional semiconductor process, and can be applied to IC semiconductor design and to effectively protect the important semiconductor devices and to prevent the semiconductor devices from ESD damage. In particular, the present invention can meet the requirements of high power semiconductor device and has better protection function compared to conventional ESD protection circuit. In the present invention, a plurality of N-wells or P-wells connected in parallel are used to adjust the discharge capacity of various wells in the P-substrate so as to improve the ESD protection capability and meet different power standards.
1. An electrostatic discharge (ESD) protection semiconductor structure with adjustable multi-trigger voltage, comprising:
a second type ion-doped layer with a plurality of ESD protection devices formed thereon, each of the ESD protection devices comprising:
a first type ion-doped well, disposed in the second type ion doped layer;
a first first-type ion heavily doped region, disposed in the second type ion doped layer, formed separately from the first type ion doped well;
a second type ion heavily doped region, disposed in the second type ion doped layer, formed separately from the first type ion doped well;
a first electrode, connected to the first first-type ion heavily doped region and the second type ion heavily doped region;
a second electrode;
a plurality of second first-type ion heavily doped region, disposed in the first type ion doped well and next to a boundary of the first type ion doped well, wherein a distance between an edge of one of the plurality of the second first-type ion heavily doped region, which is the closest to the boundary of the first type ion doped well, and the boundary of the first type ion doped well is adjustable; and
a plurality of third first-type ion heavily doped region, disposed in the first type ion doped well between the second first-type ion heavily doped regions, wherein the third first-type ion heavily doped regions are connected to the second electrode respectively.
2. The ESD protection semiconductor structure with adjustable multi-trigger voltage as claimed in claim 1 , wherein the first type ion is different from the second type ion.
3. The ESD protection semiconductor structure with adjustable multi-trigger voltage as claimed in claim 1 , wherein the second first-type ion heavily doped region closest to the boundary of the first type ion doped well is located in the first type ion doped well, wherein a distance between the edge of the second first-type ion heavily doped region closest to the boundary of the first type ion doped well and the boundary of the first type ion doped well is positive, and wherein the longer the distance, the higher the trigger voltage of the ESD protection device.
4. The ESD protection semiconductor structure with adjustable multi-trigger voltage as claimed in claim 1 , wherein the second first-type ion heavily doped region closest to the boundary of the first type ion doped well is located in the first type ion doped well partially and spans over the boundary of the first type ion doped well, wherein a distance between the edge of the second first-type ion heavily doped region closest to the boundary of the first type ion doped well and the boundary of the first type ion doped well is negative, and wherein the longer the distance, the lower the trigger voltage of the ESD protection device.
5. The ESD protection semiconductor structure with adjustable multi-trigger voltage as claimed in claim 1 , wherein the semiconductor structure with multi-trigger voltages is achieved by adjusting a distance between the edge of the second first-type ion heavily doped region which is the closest to the boundary of the first type ion doped well and the boundary of the first type ion doped well.
6. The ESD protection semiconductor structure with adjustable multi-trigger voltage as claimed in claim 1 , further comprising a pad disposed above the semiconductor structure and connected to the first electrode or the second electrode through a conductor, wherein the first electrode or the second electrode which is not connected to the pad is connected to a voltage or ground.
7. The ESD protection semiconductor structure with adjustable multi-trigger voltage as claimed in claim 1 , wherein a dosage concentration of the first type ion doped well is 1E12-3E13 (ions/cm 2 ), and a dosage concentration of the first type ion heavily doped region and the second type ion heavily doped region is 1E15-2E16 (ions/cm 2 ).
8. An electrostatic discharge (ESD) protection semiconductor structure with adjustable single-trigger voltage, comprising:
a second type ion doped layer;
a first type ion doped well, disposed in the second type ion doped layer;
a first first-type ion heavily doped region, disposed in the second type ion doped layer, is separated from the first type ion doped well;
a second type ion heavily doped region, disposed in the second type ion doped layer, is separated from the first type ion doped well;
a first electrode, connecting the first first-type ion heavily doped region and the second type ion heavily doped region;
a second electrode;
at least a second first-type ion heavily doped region, disposed in the first type ion doped well, wherein an adjustable distance is maintained between an edge of the second first-type ion heavily doped region which is the closest to the boundary of the first-type ion doped well and the boundary of the first-type ion doped well; and
a least a third first-type ion heavily doped region, disposed in the first type ion doped well between the second first-type ion heavily doped regions, wherein the third first-type ion heavily doped regions are connected to contacting the second electrode respectively.
9. The ESD protection semiconductor structure with adjustable single-trigger voltage as claimed in claim 8 , wherein the first type ion is complementary to the second type ion.
10. The ESD protection semiconductor structure with adjustable single-trigger voltage as claimed in claim 8 , wherein when the second first-type ion heavily doped region is located in the first type ion doped well, a first distance between the edge of the second first-type ion heavily doped region which is the closest to the boundary of the first type ion doped well and the boundary of the first type ion doped well is positive, and the longer the first distance, the higher the trigger voltage of the ESD protection semiconductor structure; when the second first-type ion heavily doped region spans over the boundary of the first type ion doped well, a second distance between the edge of the second first-type ion heavily doped region and the boundary of the first type ion doped well is negative, and the longer the second distance, the lower the trigger voltage of the ESD protection semiconductor structure.
11. The ESD protection semiconductor structure with adjustable single-trigger voltage as claimed in claim 8 , wherein the at least a second first-type ion heavily doped region represents a plurality of second first-type ion heavily doped regions, wherein a distance is maintained between the edge of the at least a second first-type ion heavily doped region-which is the closest to the boundary of the first type ion doped well and the boundary of the first type ion doped well, and the remaining second first-type ion heavily doped regions are connected to the second electrode respectively.
12. The ESD protection semiconductor structure with adjustable single-trigger voltage as claimed in claim 8 , wherein a dosage concentration of the first type ion doped well is 1E12-3E13 (ions/cm 2 ), and a dosage concentration of the first type ion heavily doped diffusion region and the second type ion heavily doped diffusion region is 1E15-2E16 (ions/cm 2 ).