Method of fabricating semiconductor device
View Patent ↗A method of fabricating a semiconductor device is provided. The method includes forming at least one etch target film on a substrate, forming a first reflowable etch mask on the at least one etch target film, patterning the etch target film using the first reflowable etch mask. The method further includes reflowing the first reflowable etch mask to form a second etch mask and patterning the etch target film using the second etch mask.
1. A method of fabricating a semiconductor device, comprising:
forming a second etch target film on a substrate;
forming a first etch target film on the second etch target film;
forming a first reflowable etch mask on the first etch target film;
patterning the first etch target film using the first reflowable etch mask;
reflowing the first reflowable etch mask to form a second etch mask; and
patterning the second etch target film using the second etch mask,
wherein the reflowing is induced by performing a thermal treatment of the first reflowable etch mask,
wherein the thermal treatment is performed at a temperature range of about 120° C. to about 140° C.
2. The method of claim 1 , wherein the first reflowable etch mask is formed by patterning a photoresist film.
3. The method of claim 2 , wherein the photoresist film is formed of a photoresist comprising about 5-about 30% by weight of a polymer resin, about 2-about 10% by weight of a photosensitive compound, about 0.5-about 3% by weight of heat-resistant additive, and an organic solvent.
4. The method of claim 3 , wherein the polymer resin is a novolak resin which comprises meta cresol and para cresol and has a molecular weight of about 2,000-about 5,000.
5. The method of claim 3 , wherein the photosensitive compound is a diazide compound.
6. The method of claim 3 , wherein the heat-resistant additive is a bisphenol compound.
7. The method of claim 1 , wherein the second etch mask is foamed on a first region which is substantially the same in position as the first reflowable etch mask and a second region which is adjacent to the first region and corresponds to a position expanded by the reflowing.
8. The method of claim 7 , wherein the second etch target film is patterned so as to be aligned on an edge of the second region.
9. The method of claim 7 , wherein the patterning of the second etch target film comprises:
etching the second etch target film using the second etch mask;
exposing a portion of the second etch target film overlapping the second region by uniformly removing the second etch mask by a predetermined thickness; and
etching the exposed portion of the second etch target film by a predetermined thickness.
10. The method of claim 9 , wherein the etching of the second etch target film, the uniform removing of the second etch mask, and the etching of the exposed portion of the second etch target film are continuously performed.
11. A method of fabricating a semiconductor device, comprising:
forming a gate electrode and a gate insulating film on a substrate;
forming a semiconductor film and a conductive film on the gate insulating film;
forming a first reflowable etch mask on the conductive film;
patterning the conductive film using the first reflowable etch mask to form a source electrode and a drain electrode;
reflowing the first reflowable etch mask to form a second etch mask; and
patterning the semiconductor film using the second etch mask,
wherein the reflowing is induced by performing a thermal treatment of the first reflowable etch mask,
wherein the second etch mask is formed on a first region which is substantially the same in position as the first reflowable etch mask and a second region which is adjacent to the first region and which corresponds to a position expanded by the reflowing, and
wherein the patterning of the semiconductor film comprises:
etching the semiconductor film using the second etch mask;
exposing a portion of the second etch target film overlapping the second region by uniformly removing the second etch mask by a predetermined thickness; and
etching the exposed portion of the semiconductor film by a predetermined thickness.
12. The method of claim 11 , wherein the first reflowable etch mask is formed by patterning a photoresist film.
13. The method of claim 12 , wherein the thermal treatment is performed at a temperature range of about 120° C.-about 140° C.
14. The method of claim 12 , wherein the photoresist film is formed of a photoresist comprising about 5-about 30% by weight of a polymer resin, about 2-about 10% by weight of a photosensitive compound, about 0.5-about 3% by weight of a heat-resistant additive, and an organic solvent.
15. The method of claim 14 , wherein the polymer resin is a novolak resin which comprises meta cresol and para cresol and has a molecular weight of about 2,000-about 5,000.
16. The method of claim 14 , wherein the photosensitive compound is a diazide compound.
17. The method of claim 14 , wherein the heat-resistant additive is a bisphenol compound.
18. The method of claim 11 , wherein the semiconductor film is patterned so as to be aligned on an edge of the second region.
19. The method of claim 11 , wherein the semiconductor film comprises an active layer forming a channel region and an ohmic contact layer formed at an upper portion of the semiconductor film and including impurity ions.
20. The method of claim 19 , wherein the etching of the exposed portion of the semiconductor film comprises removing an exposed portion of the ohmic contact layer.
21. The method of claim 11 , wherein the etching of the semiconductor film using the second etch mask, the uniform removing of the second etch mask, and the etching of the exposed portion of the semiconductor film are continuously performed.
22. The method of claim 11 , wherein the semiconductor film is formed of amorphous silicon.