Apparatus for fabricating flat panel display, and apparatus and method for detecting quantity of static electricity thereof

1. A fabricating apparatus of a flat panel display device, comprising:

lift pins for lifting a substrate;

a susceptor through which the lift pins pass;

a light emitter for transmitting light to a space between the susceptor and the substrate during descent of the susceptor;

a light receiver for receiving the transmitted light;

a traveled-distance sensing part for sensing the traveled distance of the susceptor;

a controller for automatically determining whether the substrate is separated from the susceptor by use of a sensed traveled-distance value from the traveled-distance sensing part and a detected light amount from the light receiver, storing the sensed traveled-distance value when a detected light amount is greater than a pre-set reference light amount value, and determining a quantity of static electricity charge by linking one pre-set static electricity charge value corresponding to the stored sensed traveled-distance in a lookup table in a memory; and

a display part for displaying the quantity of static electricity charge determined by the controller, for determining an application time of a radio frequency (RF) power to counter the static electricity charge.

2. The fabricating apparatus according to claim 1 , wherein the lift pins are deployed to lift a substrate as the susceptor descends.

3. An apparatus fabricating a flat panel display device, comprising:

a light emitter for transmitting light through a space between the susceptor and a substrate during descent of the susceptor;

a light receiver for receiving the transmitted light;

a traveled-distance sensing part for sensing a traveled distance of the susceptor;

a controller for automatically determining whether the substrate is separated from the susceptor by use of a sensed traveled-distance value and a detected light amount from the light receiver, storing the sensed traveled-distance value when a detected light amount is greater than a pre-set reference light amount value, and determining a quantity of static electricity charge by linking one pre-set static electricity charge value corresponding to the stored sensed traveled-distance in a lookup table in a memory; and

a display part for displaying the quantity of static electricity charge detected by the controller, for determining an application time of a radio frequency (RF) power to counter the static electricity charge.

4. The apparatus according to claim 3 , wherein the traveled distance is the traveled distance of the susceptor.

5. A fabricating apparatus of a flat panel display device, comprising:

lift pins for lifting a substrate, the lift pins being able to ascend and descend;

a susceptor through which the lift pins pass;

a light emitter for transmitting light to a space between the susceptor and the substrate during ascent of the lift pins;

a light receiver for receiving the transmitted light;

a traveled-distance sensing part for sensing the traveled distance of the lift pins;

a controller for automatically determining whether the substrate is separated from the susceptor by use of a sensed traveled-distance value and a detected light amount from the light receiver part, storing the sensed traveled-distance value when a detected light amount is greater than a pre-set reference light amount value, and determining a quantity of static electricity charge by linking one pre-set static electricity charge value corresponding to the stored sensed traveled-distance in a lookup table in a memory; and

a display part for displaying the quantity of the static electricity determined by the controller, for determining an application time of a radio frequency (RF) power to counter the static electricity charge.