Granted Patent B2

US 7,210,502 · App. 11/437,022 · Granted May 1, 2007

Abstract

Claims (45)

1. A microvalve device for controlling fluid flow comprising: a 2-way pilot operated microvalve; and

a 4-way pilot microvalve for controlling the 2-way pilot operated microvalve;

wherein the 4-way pilot microvalve comprises:

a pilot body having an intermediate pilot plate layer with a pilot cavity formed therein;

an elongated beam being movably disposed in said pilot cavity and attached to a fixed portion of said intermediate pilot plate layer by a flexible hinge so as to be moveable between a first and second position;

first and second pilot valves each including a first pilot port, a second pilot port, and a third pilot port formed in said pilot body, each of said pilot ports being in fluid communication with said pilot cavity, each of said pilot valves including a pilot blocking portion extending from opposite ends of said elongated beam and moveable with said beam in said pilot cavity; and

an actuator operably coupled to said elongated beam for moving said beam between said first and second positions such that when said actuator is in an unactuated position said beam is in said first position and said third pilot ports are in fluid communication with said first pilot ports and isolated from said second pilot ports and such that when said actuator is in a fully actuated position said beam is in said second position and said second pilot ports are in fluid communication with said third pilot ports and isolated from said first pilot ports.

2. The microvalve device of claim 1 wherein when said actuator is in an intermediate position between said unactuated position and said fully actuated position said first pilot ports and said second pilot ports are both in fluid commination with said third pilot ports.

3. The microvalve device of claim 1 wherein said blocking portions extend from said elongated beam at an angle of approximately 90°.

4. The microvalve device of claim 1 wherein said blocking portions each include a slot defined therein through which fluid communication is provided between said third port and said first port when said actuator in said unactuated position and through which fluid communication is provided between said third port and said second port when said actuator in said fully actuated position.

5. A microvalve device for controlling fluid flow comprising: a 2-way pilot operated microvalve; and

a 4-way pilot microvalve for controlling the 2-way pilot operated microvalve;

wherein the 2-way pilot operated microvalve comprises:

a spool microvalve body having an intermediate spool plate layer having a fixed portion a spool cavity formed therein, said spool microvalve body having a first spool port, and a second spool port, each of said spool ports formed in said spool microvalve body, each of said spool ports being in fluid communication with said spool cavity;

at least one spool spring attached to said fixed portion of said intermediate spool plate layer;

a spool valve including at least one spool blocking portion attached to said spool spring and moveably disposed in said spool cavity such that said spool blocking portion is operable to vary the fluid communication between said first spool port and said second spool port.

6. The microvalve device of claim 5 wherein the 2-way pilot operated microvalve further comprises:

a third spool port in fluid communication with the 4-way pilot microvalve; and

a fourth spool port in fluid communication with the 4-way pilot microvalve, wherein said third spool port and said fourth spool port are in fluid communication with said spool cavity and are each formed in said spool microvalve body so as to provide fluid communication at either end of said spool blocking portion to move said spool blocking portion in response to changes in fluid pressure from said pilot microvalve.

7. The microvalve device of claim 5 wherein the 2-way pilot operated microvalve further comprises a dashpot defined by a longitudinal protrusion of one end of said blocking portion cooperating with a corresponding recess formed in said fixed portion, said dashpot being operable to dampen oscillations of said spool valve.

8. The microvalve device of claim 5 wherein the 2-way pilot operated microvalve further comprises a spool beam extending longitudinally from said fixed portion and said spool blocking portion defines a recessed portion, said recessed portion slidably engaging said spool beam.

9. A microvalve for controlling fluid flow comprising:

a pilot portion comprising:

a pilot intermediate plate layer including a fixed portion defining a pilot cavity;

an elongated beam disposed in the pilot cavity attached to said fixed portion of the pilot intermediate plate layer by a flexible hinge;

an actuator attached to the fixed portion and attached to the elongated beam for moving the elongated beam relative to the fixed portion;

a pair of pilot microvalves, each pilot valve comprising:

a first micro port in fluid communication with said pilot cavity;

a second micro port in fluid communication with said pilot cavity;

a third micro port in fluid communication with said pilot cavity; and

a blocking portion extending from opposite ends of said elongated beam for selectively allowing fluid communication between said first micro port and said third micro port and between said second micro port and said third micro port; and

a spool portion comprising:

a spool portion plate defining a spool cavity;

a spool spring disposed in said spool cavity and attached to a fixed portion of said spool portion plate;

a spool valve disposed in the spool cavity comprising:

a first pair of spool ports in fluid communication with said spool cavity and in fluid communication with said third pilot ports;

a second pair of spool ports in fluid communication with said spool cavity; and

at least one blocking portion disposed in said spool cavity, attached to said spool spring, and suitable for varying the fluid communication between said second pair of spool ports in relation to the fluid communication between the first spool ports and the third pilot ports.

10. The microvalve of claim 9 wherein an intermediate layer plate of a multi-layer valve body comprises the pilot portion plate and the spool portion plate.

11. A microvalve device for controlling fluid flow comprising:

a pilot body having a pilot chamber, a pair of first pilot ports, and a pair of second pilot ports, and a pair of primary ports formed therein, each of said ports being in fluid communication with said chamber and being adapted for connection with one of a plurality of fluid sources, a pair of pilot microvalves being movably disposed in said pilot chamber and supported by said body for allowing selective fluid communication between said first pilot ports and said primary ports and between said second pilot ports and said primary ports;

an actuator coupling said pilot microvalves for simultaneously moving said pilot microvalves in tandem;

a spool body having a spool chamber having first and second ends, said first end in fluid communication with one of said primary ports, said second end in fluid communication with the other of said primary ports, and having a pair of secondary ports in fluid communication with said spool chamber;

a spool spring attached to a fixed portion of said spool body; and

a spool blocking portion attached to said spool spring, said spool blocking portion being movably disposed in a spool chamber for movement between a first position and a second position whereby positioning of said spool blocking section is controlled by fluid pressure varied by positioning said pilot microvalves, said spool blocking portion being operable to vary the fluid communication between said secondary ports.

Assignments (8)