IP Library Granted Patent US 7,378,337
Granted Patent B2
US 7,378,337 · App. 11/437,117 · Granted May 27, 2008

Laser-based termination of miniature passive electronic components

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Quick Facts
Patent No.
US 7,378,337
App. No.
11/437,117
Granted
May 27, 2008
Kind
B2
Abstract

Terminating the ends of passive electronic components entails applying a laser-removable coating to one or both of the opposed major surfaces of a substrate. A UV laser beam having a spot size and an energy distribution sufficient to remove the laser-removable coating from multiple selected regions of at least one of the major surfaces to which the laser-removable coating was applied is directed for incidence on the substrate. Relative motion between the UV laser beam and substrate effects removal of sufficient amounts of laser-removable coating to expose the multiple selected regions. The substrate is then broken into multiple rowbars or individual components, each of which includes side margins. An electrically conductive material is applied to the side margins to form electrically conductive interconnects between portions of the side margins spatially aligned with the multiple selected regions.

Claims (23)

1. A method of fabricating passive electronic components that are formed from a substrate having opposed first and second major surfaces and include electrically conductive interconnects, comprising:

applying laser-removable coatings to at least one of the opposed first and second major surfaces of the substrate;

directing for incidence on the substrate a laser beam having a spot size and an energy distribution sufficient to remove the laser-removable coating from multiple selected regions of at least one of the first and second major surfaces to which the laser-removable coating was applied;

aligning and imparting relative motion between the laser beam and each of the multiple selected regions to remove sufficient amounts of the laser-removable coatings to expose the multiple selected regions;

breaking the substrate to form multiple passive electronic components, each having side margins between the first and second major surfaces; and

applying an electrically conductive material along the side margins of the passive electronic components to form electrically conductive interconnects between portions of the side margins spatially aligned with the multiple selected regions.

2. The method of claim 1 , in which the substrate comprises multiple spaced-apart sheet electrodes stacked between the first and second major surfaces, the sheet electrodes having exposed portions at the side margins of the passive electronic components after the breaking of the substrate.

3. The method of claim 2 , in which the multiple selected regions of at least one of the first and second major surfaces support electrical conductors.

4. The method of claim 3 , in which the electrically conductive interconnects between the portions of the side margins spatially aligned with the multiple selected regions supporting electrical conductors are generally J-shaped.

5. The method of claim 4 , in which there are anchor tabs exposed at the side margins of the passive electronic components, and in which the J-shaped electrically conductive interconnects are formed to follow rounded edges of the side margins and interconnect the anchor tabs exposed at the side margins of the passive electronic components.

6. The method of claim 3 , in which the breaking of the substrate results in multiple singulated electronic components, and in which the applying of an electrically conductive material is performed on the singulated electronic components.

7. The method of claim 6 , in which the applying of an electrically conductive material is accomplished by an electroplating process.

8. The method of claim 3 , in which the substrate includes a ceramic material.

9. The method of claim 2 , in which the breaking of the substrate into multiple passive electronic components is accomplished by providing the substrate with scribe lines formed along the lengths of the selected regions of at least one of the first and second major surfaces and applying a breakage force to the substrate to effect breakage of the substrate into separate pieces having side margins defined by the scribe lines.

10. The method of claim 9 , in which the selected regions of at least one of the first and second major surfaces support electrical conductors, and in which the scribe lines are formed in the electrical conductors.

11. The method of claim 1 , in which the selected regions of at least one of the first and second major surfaces support electrical conductors, and in which the breaking of the substrate forms multiple rowbars of the multiple passive electronic components.

12. The method of claim 11 , in which the multiple selected regions of at least one of the first and second major surfaces support electrical conductors.

13. The method of claim 12 , in which the electrically conductive interconnects between the portions of the side margins spatially aligned with the multiple selected regions supporting electrical conductors are generally J-shaped.

14. The method of claim 12 , in which the applying of an electrically conductive material is accomplished by a dip coating process.

15. The method of claim 12 , in which the applying of an electrically conductive material is accomplished by a vapor deposition process.

16. The method of claim 1 , in which the multiple selected regions include regions of the first and second major surfaces.

17. The method of claim 16 , in which none of the multiple selected regions of the first and second substrates supports an electrical conductor.

18. The method of claim 17 , in which the electrically conductive interconnects between the portions of the side margins spatially aligned with the multiple selected regions are generally U-shaped and cover portions of the multiple selected regions.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 6, 2006
From: SWENSON, EDWARD J.; GARCIA, DOUGLAS J.; GOLDWATER, BRUCE STUART
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 017883/0908 →