Sunken electrode configuration for MEMs micromirror
View Patent ↗A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
1. A micro-electro-mechanical device mounted on a substrate comprising:
a pivoting member pivotally mounted on said substrate about a first axis;
a first hot electrode mounted on the substrate beneath the pivoting member providing electro-static forces therebetween for pivoting the pivoting member about the first axis;
a first ground electrode mounted on the substrate beneath the pivoting member surrounding the first hot electrode, whereby the first ground and first hot electrodes are separated by a step creating a vertical gap therebetween; and
a dielectric material in the gap for isolating the first hot electrode from the first ground electrode.
2. The device according to claim 1 , wherein the first hot electrode is sunken relative to the first ground electrode.
3. The device according to claim 2 , wherein the step includes a surface, which is under cut at a negative angle from vertical beneath the first ground electrode.
4. The device according to claim 1 , wherein the first hot electrode includes a trace electrode extending therefrom for connection with a power source; and wherein the first ground electrode covers the trace electrode.
5. The device according to claim 1 , wherein the pivoting member includes a first end proximate the first axis, and an outer free end remote from the first axis; wherein the first hot electrode includes a first step beneath the first end, and a second step, lower than the first step, beneath the outer free end.
6. The device according to claim 1 , wherein the pivoting member includes a first and a second supporting region on opposite sides of said first axis; wherein the first electrode is beneath the first supporting region providing electro-static forces therebetween; and further comprising a second electrode beneath the second supporting region for pivoting the pivoting member about the first axis.
7. The device according to claim 1 , further comprising shields disposed on each side of said first hot electrode for limiting the amount of electrical cross-talk between adjacent pivoting members.
8. The device according to claim 7 , wherein the shields extend downwardly from an undersurface of said pivoting member.
9. The device according to claim 7 , wherein the shields extend upwardly from the substrate above a top surface of the first electrode, and downwardly from an undersurface of said pivoting member inside or outside of the upwardly extending shields.