Inkjet printhead having enclosed inkjet actuators
View Patent ↗An inkjet printhead is provided having a plurality of ink ejection nozzles. Each nozzle has a substrate incorporating circuitry for supplying an electrical current and a channel for supplying ink, a chamber on the substrate in fluid communication with the channel, an aperture in fluid communication with the chamber, a micro-electromechanical actuator on the substrate electrically connected to the circuitry to be displaced on receipt of the electrical current thereby ejecting ink from the aperture, and an enclosure on the substrate enclosing the micro-electromechanical actuator.
1. An inkjet printhead comprising a plurality of ink ejection nozzles, each nozzle comprising:
a substrate incorporating circuitry for supplying an electrical current and a channel for supplying ink;
a chamber on the substrate in fluid communication with the channel;
an aperture in fluid communication with the chamber;
a micro-electromechanical actuator on the substrate electrically comprising conductive, thermally expandable material connected to the circuitry so as to be heated on receipt of the electrical current thereby causing displacement of the actuator and ejection of ink from the aperture; and
an enclosure on the substrate enclosing the micro-electromechanical actuator.
2. A printhead as claimed in claim 1 , wherein each enclosure has side walls that extend from the substrate and a roof spanning the side walls so as to be spaced from the substrate.
3. A printhead as claimed in claim 2 , wherein each actuator incorporates an elongate arm, the one end of the arm being connected to the circuitry at the substrate and the other end of the arm being arranged to be displaced relative to the substrate on receipt of the electrical current.
4. A printhead as claimed in claim 3 , wherein each arm incorporates portions of the conductive, thermally expandable material, a first portion defining a heating circuit connected to the circuitry to be resistively heated on receipt of the electrical current and subsequently cooled on termination thereof, and a second portion being insulated from the circuitry, the first and second portions being arranged with respect to one another so that the arm experiences differential thermal expansion and contraction reciprocally to displace the displaceable end of the arm.
5. A printhead as claimed in claim 3 , wherein a motion-transmitting structure is fast with the displaceable end of each arm, the motion-transmitting structure defining part of the roof and being spaced from the remaining part of the roof.
6. A printhead as claimed in claim 5 , wherein each roof is arranged to cover the arm, the motion-transmitting structure being shaped so that the roof and the motion-transmitting structure define generally co-planar surfaces that are spaced from, and are generally parallel to, the substrate and each other.
7. A printhead as claimed in claim 5 , wherein each nozzle further comprises an ejection member positioned in the chamber and connected to the actuator to eject the ink from the aperture upon displacement of the actuator.
8. A printhead as claimed in claim 7 , wherein each motion-transmitting structure incorporates a fulcrum formation pivotally anchored to the substrate, a lever arm formation mounted on the fulcrum formation, an effort formation interconnecting the displaceable end of the arm and the lever arm formation, and a load formation interconnecting the lever arm formation and the ejection member.
9. A printhead as claimed in claim 8 , wherein each respective set of the lever arm formation, the roof and the side walls define a unitary structure with the lever arm formation being connected to the side walls with a pair of opposed torsion formations that are configured to twist as the lever arm formation is displaced.