IP Library Granted Patent US 7,649,609
Granted Patent B2
US 7,649,609 · App. 11/445,193 · Granted Jan 19, 2010

Method of fabricating and repairing a short defect in LCD device having a residue pattern of a predetermined line width removed after forming photo-resist pattern through rear exposure

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Quick Facts
Patent No.
US 7,649,609
App. No.
11/445,193
Granted
Jan 19, 2010
Kind
B2
Abstract

A method for repairing a short defect according to the present invention includes forming a first conductive pattern on a substrate, forming a photo-resist pattern on the first conductive pattern using a rear exposure for the first conductive pattern being shorted by a residue pattern, and removing the residue pattern exposed through the photo-resist pattern.

Claims (15)

1. A method for repairing a short defect for a liquid crystal display device, comprising:

forming a first conductive pattern on a substrate;

forming a photo-resist pattern on the first conductive pattern using a rear exposure for the first conductive pattern being shorted by a residue pattern, wherein the residue pattern has a line width equal to or less than a resolution level of the rear exposure; and

removing the residue pattern exposed through the photo-resist pattern.

2. The method according to claim 1 , wherein forming the photo-resist pattern includes:

coating a photo-resist on the first conductive pattern; and

forming the photo-resist pattern by rear-exposing the photo-resist.

3. A method of fabricating a liquid crystal display device, comprising:

forming a gate line and a common line on a substrate;

forming a photo-resist pattern on the gate line and the common line using a rear exposure for the gate line and the common line being shorted by a residue pattern, wherein the residue pattern has a line width not greater than a resolution level of the rear exposure; and

removing the residue pattern exposed through the photo-resist pattern.

4. The method according to claim 3 , wherein forming the photo-resist pattern includes:

forming a photo-resist on a substrate where the gate line and the common line are formed; and

forming the photo-resist pattern by the rear exposure using the gate line and the common line as a mask.

5. The method according to claim 3 , wherein the residue pattern has a line width equal to or less than about 4 μm.

Assignments (2)
CHANGE OF NAME Recorded Jun 19, 2008
From: LG.PHILIPS LCD CO., LTD.
To: LG DISPLAY CO., LTD.
Reel/Frame 021147/0009 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 2, 2006
From: YOO, SOON SUNG; CHO, HEUNG LYUL
To: LG. PHILIPS LCD CO., LTD.
Reel/Frame 017966/0532 →