Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device includes a substrate, and a semiconductor thin film bonded to the substrate, wherein the semiconductor thin film includes a plurality of discrete operating regions and an element isolating region which isolates the plurality of discrete operating regions, and the element isolating region is etched to a shallower depth than a thickness of the semiconductor thin film, and is a thinner region than the plurality of discrete operating regions.
1. A method of manufacturing a semiconductor device comprising:
forming a semiconductor thin film including an operating layer on a first substrate;
separating said semiconductor thin film from said first substrate;
bonding said semiconductor thin film separated from said first substrate to a second substrate; and
etching, in an element isolating region, said semiconductor thin film bonded to said second substrate from an upper surface of said semiconductor thin film to a depth deeper than a bottommost portion of said operating layer and shallower than a thickness of said semiconductor thin film, the etching forming a plurality of isolated discrete operating regions each having a discrete isolated operating layer, the isolated discrete operating regions being electrically isolated from each other by the element isolating region.
2. The method according to claim 1 , further comprising:
forming discrete interconnection layers extending from tops of said discrete operating regions over said element isolating region to a top of said second substrate,
wherein said second substrate is a driving circuit substrate including an integrated circuit.
3. The method according to claim 1 , further comprising:
forming a metal layer on said second substrate prior to bonding said semiconductor thin film to said second substrate,
wherein in the step of bonding said semiconductor thin film to said second substrate, said semiconductor thin film is bonded to said metal layer.
4. The method according to claim 1 , wherein the step of bonding further comprises inducing a reaction between the semiconductor thin film and the second substrate.
5. The method according to claim 4 , wherein the reaction comprises an atomic rearrangement of the interface between the semiconductor thin film and the second substrate.