Anti-reflective film and production method thereof, and stamper for producing anti-reflective film and production method thereof
View Patent ↗In this method for producing an anti-reflective film, pores are formed on a surface of a polymer molding material to continuously change a refractive index and then reduce reflectance, in which anodic oxidized porous alumina, in which pores having a tapered shape and whose pore diameter continuously changes, are formed by repeating anodic oxidation at about the same formation voltage and pore diameter enlargement treatment, is used as a mold, or a stamper, which is produced by using the anodic oxidized porous aluminum as a mold, is used as a mold.
1. A method for producing an anti-reflective film comprising forming unevenness on a surface of a polymer molding material to continuously change a refractive index and then reduce reflectance;
wherein anodic oxidized porous alumina, in which pores have a tapered shape and whose pore diameter continuously changes, are formed by repeating anodic oxidation at about the same formation voltage and pore diameter enlargement treatment, is used as a mold, or a stamper, which is produced by using the anodic oxidized porous aluminum as a mold, is used as a mold.
2. The method for producing an anti-reflective film according to claim 1 , wherein the anodic oxidized porous alumina used has a pore period of 50 to 600 nm and a pore depth of 100 nm or more.
3. The method for producing an anti-reflective film according to claim 1 , wherein the anodic oxidized porous alumina used is produced by carrying out anodic oxidation for an extended period of time at a constant voltage and temporarily removing an oxide film, followed by repeating anodic oxidation at about the same formation voltage and pore diameter enlargement treatment.
4. The method for producing an anti-reflective film according to claim 1 , wherein oxalic acid is used for the electrolyte, and the anodic oxidized porous alumina used is produced at a formation voltage of 30 to 60 V.
5. The method for producing an anti-reflective film according to claim 1 , wherein sulfuric acid is used for the electrolyte, and the anodic oxidized porous alumina used is produced at a formation voltage of 20 to 30 V.
6. The method for producing an anti-reflective film according to claim 1 , wherein phosphoric acid is used for the electrolyte, and the anodic oxidized porous alumina used is produced at a formation voltage of 180 to 210 V.
7. The method for producing an anti-reflective film according to claim 1 , wherein in the production of the anodic oxidized porous alumina, fine depressions are formed in a surface of aluminum prior to anodic oxidation, and these depressions are used as pore formation points during anodic oxidation.
8. An anti-reflective film produced a method according to claim 1 .
9. The anti-reflective film according to claim 8 , wherein the anti-reflective film is provided on the surface of a light-transmitting polymer molding material.
10. A method for producing a stamper used to produce an anti-reflective film comprising forming unevenness on the surface of a polymer molding material to continuously change a refractive index and then reduce reflectance;
wherein anodic oxidized porous alumina, in which pores having a tapered shape and whose pore diameter continuously changes, are formed by repeating anodic oxidation at about the same formation voltage and pore diameter enlargement treatment, is used as a mold.
11. A stamper used to produce an anti-reflective film produced according to the method according to claim 10 .
12. A method of manufacturing a mold composed of anodic oxidized porous alumina, comprising:
a first step of carrying out anodic oxidation to an aluminum substrate to form an alumina layer,
a second step of removing the alumina layer,
a third step of carrying out anodic oxidation to the aluminum substrate to form pores after the second step,
a fourth step of carrying out pore diameter enlargement treatment to the pores,
a fifth step of carrying out anodic oxidation after the fourth step, and
a sixth step of repeating the fourth and fifth steps alternately.
13. A method of manufacturing a mold composed of anodic oxidized porous alumina according to claim 12 , wherein the sixth step is finished at the pore diameter enlargement treatment of the fourth step.
14. A method of manufacturing a mold composed of anodic oxidized porous alumina according to claim 12 , wherein the anodic oxidation is carried out with oxalic acid as an electrolyte and at a formation voltage of 30 to 60 V.
15. A method of manufacturing a mold composed of anodic oxidized porous alumina according to claim 12 , wherein the anodic oxidation is carried out with sulfuric acid as an electrolyte and at a formation voltage of 20 to 30 V.
16. A mold of anodic oxidized porous alumina manufactured by the method according to any one of claims 12 to 15 .
17. A mold composed of anodic oxidized porous alumina according to claim 16 , wherein the mold has a pore period of 50 to 600 nm and a pore depth of 100 nm or more.