Composition for removing conductive materials and manufacturing method of array substrate using the same
View Patent ↗A composition for removing a conductive material and a manufacturing method of an array substrate using the composition, wherein the composition may include a nitric acid of about 3 to 15 wt %, a phosphoric acid of about 40 to 70 wt %, an acetic acid of about 5 to 35 wt %. The composition may further include a chlorine compound of about 0.05 to 5 wt %, a chlorine stabilizer of about 0.01 to 5 wt %, a pH stabilizer of about 0.01 to 5 wt %, and water of residual quantity.
1. A manufacturing method of an array substrate for a liquid crystal display device using a composition for removing conductive materials that includes a nitric acid of about 3 to 15 wt %, a phosphoric acid of about 40 to 70 wt %, an acetic acid of about 5 to 35 wt %, a chlorine compound of about 0.05 to 5 wt %, a chlorine stabilizer of about 0.01 to 5 wt %, a pH stabilizer of about 0.01 to 5 wt %, and water of residual quantity, the method comprising:
forming a gate electrode on a substrate by etching a first metal layer using the composition;
forming a gate insulating layer on the gate electrode;
forming a semiconductor layer on the gate insulating layer;
forming source and drain electrodes on the semiconductor layer by etching a second metal layer using the composition;
forming a passivation layer on the source and drain electrodes, the passivation layer having a contact hole exposing the drain electrode; and
forming a pixel electrode on the passivation layer by etching a third metal layer using the composition.
2. The method according to claim 1 , wherein the first metal layer is a single layer of aluminum alloy or molybdenum.
3. The method according to claim 1 , wherein the first metal layer includes a double layer of aluminum alloy and molybdenum.
4. The method according to claim 1 , wherein the second metal layer includes aluminum alloy or molybdenum.
5. The method according to claim 1 , wherein the third metal layer includes indium tin oxide.
6. The method according to claim 1 , wherein the chlorine compound is dissociated into Cl −1 .
7. The method according to claim 1 , wherein the chlorine compound includes at least one of KCl, HCl, LiCl, NH 4 Cl, CuCl 2 , FeCl 3 , FeCl 2 , CaCl 2 , CoCl 2 , NiCl 2 , ZnCl 2 , AlCl 3 , BaCl 2 , BeCl 2 , BiCl 3 , CdCl 2 , CeCl 2 , CsCl 2 , H 2 PtCl 6 , and CrCl 3 .
8. The method according to claim 1 , wherein the chlorine stabilizer includes at least one of a Zn compound, a Cd compound, a Pb compound, a Ba compound and an oleic acid.
9. The method according to claim 1 , wherein the chlorine stabilizer includes at least one of ZnCl 2 , Zn(NO 3 ) 2 , Zn(CH 3 COO) 2 , Zn(C 17 H 35 COO) 2 , C 2 H 2 O 4 Zn, Zn 3 (PO 4 ) 2 , Zn(CO 3 ), Cd(CH 3 COO) 2 , CdCl 2 , CdI 2 , Cd(NO 3 ) 2 , Cd(CO 3 ), Pb(CH 3 COO) 2 , C 12 H 10 O 14 Pb 3 , PbI 4 , Pb(NO 3 ) 2 , PB(C 17 H 35 COO) 2 , Ba(CH 3 COO) 2 , BaCO 3 , BaCl 2 , BaI 2 , Ba(NO 3 ) 2 , and Ba(H 2 PO 4 ) 2 .
10. The method according to claim 1 , wherein the pH stabilizer is dissociated into OH—.
11. The method according to claim 1 , wherein the pH stabilizer includes at least one of NaOH, KOH, LiOH, Ca(OH 2 ), Al(OH) 3 , Mg(OH) 2 , Ba(OH) 2 , Co(OH) 2 , Cu(OH) 2 , Ni(OH) 2 , Zr(OH) 2 , and Zn(OH 2 ).
12. The method according to claim 1 , wherein the water is pure water filtered through an ion exchange resin.
13. The method according to claim 2 , wherein the aluminum alloy is AlNd.
14. The method according to claim 1 , wherein the etching occurs at a temperature of 30-50 degrees Celsius.
15. The method according to claim 14 , wherein etching the first metal layer includes an etching duration based upon a thickness and type of material of the first metal layer.
16. The method according to claim 14 , wherein etching the second metal layer includes an etching duration based upon a thickness and type of material of the second metal layer.
17. The method according to claim 14 , wherein etching the third metal layer includes an etching duration based upon a thickness and type of material of the third metal layer.
18. The method according to claim 3 , wherein the aluminum alloy is AlNd.
19. The method according to claim 4 , wherein the aluminum alloy is AlNd.
20. The method according to claim 2 , wherein the second metal layer includes aluminum alloy or molybdenum.
21. The method according to claim 20 , wherein the third metal layer includes indium tin oxide.
22. The method according to claim 3 , wherein the second metal layer includes aluminum alloy or molybdenum.
23. The method according to claim 22 , wherein the third metal layer includes indium tin oxide.