An optical switch includes an input optical fiber, an output optical fiber, a grating which performs spectral separation of an optical signal to a plurality of optical signals having different wavelengths, a plurality of movable mirrors, each reflecting an optical light subjected to spectral separation, and directing the optical light appropriately to the input fiber, and each of the movable mirrors can be inclined, a mirror-angle detector which detects an angle of inclination of each of the movable mirrors, a table which associates a wavelength number which identifies the optical signals of the plurality of wavelengths, and an output-destination number which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror, and a control circuit which performs a feed-back control such that an angle of inclination AD which is output from the table and an output from the mirror-angle detector match.
1. An optical switch comprising:
at least one input optical fiber to which optical signals of a plurality of wavelengths are input upon multiplexing;
at least one output optical fiber;
a wavelength dispersive element which performs a spectral separation of the optical signal from the input optical fiber to a plurality of optical signals of different wavelengths;
a plurality of movable mirrors, each of the mirrors being inclinable, and reflects each of the optical signal subjected to the spectral separation, from the wavelength dispersive element, and directs appropriately to the output optical fiber;
a mirror-angle detector which detects an angle of inclination of each movable mirror;
a first calculating unit which associates a first value which identifies the optical signals of the plurality of wavelengths, and a second value which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror; and
a control circuit which performs a feed-back control of the movable mirror such that a value of the angle of inclination of the movable mirror, which is output from the first calculating unit, and an output from the mirror angle detector match.
2. An optical switch comprising:
at least one input optical fiber to which optical signals of a plurality of wavelengths are input upon multiplexing;
at least one output optical fiber;
a wavelength dispersive element which performs a spectral separation of the optical signal from the input optical fiber to a plurality of optical signals of different wavelengths;
a plurality of movable mirrors, each of the mirrors being inclinable, and reflects each of the optical signal subjected to the spectral separation, from the wavelength dispersive element, and directs appropriately to the output optical fiber;
a mirror-angle detector which detects an angle of inclination of each movable mirror;
a first calculating unit which associates a first value which identifies the optical signals of the plurality of wavelengths, and a second value which identified the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror;
a second calculating unit which associates the first value and the second value with a driving current or a drive voltage of each movable mirror, wherein
an output of the second calculating unit is added to the control circuit; and
a control circuit which performs a feed-back control of the movable mirror such that a value of the angle of inclination of the movable mirror, which is output from the first calculating unit, and an output from the mirror angle detector match.
3. The optical switch according to claim 2 , wherein the first calculating unit further associates a third value which is equivalent to an amount of attenuation applied to the optical signal, with the angle of inclination of each movable mirror.
4. The optical switch according to claim 3 , wherein
the movable mirror includes
a movable section on which a mirror is provided,
a fixed section,
an elastic supporting section which inclinably supports the movable section with respect to the fixed section,
a base substrate which is connected to the fixed section, and is provided facing the movable section,
a fixed electrode which is provided on the base substrate, and
a movable electrode which is provided on the movable section, wherein
the mirror-angle detector detects the angle of inclination of the mirror based on an electrostatic capacitance between the fixed electrode and the movable electrode.
5. The optical switch according to claim 4 , wherein
any one of the fixed electrode and the movable electrode includes a first independent electrode and a second independent electrode which are provided substantially symmetrically, sandwiching an axis of inclination of the movable section, the other one of the fixed electrode and the movable electrode includes a common electrode which is at a same electric potential, and
the mirror-angle detector detects the angle of inclination of the movable mirror based on a difference between a first capacitance which is determined by the first independent electrode and the common electrode, and a second capacitance which is determined by the second independent electrode and the common electrode.
6. The optical switch according to claim 5 , wherein
the fixed electrode includes the first independent electrode and the second independent electrode, and
the movable electrode includes the common electrode.
7. The optical switch according to claim 5 , wherein
a first reference signal is applied to the first independent electrode, and
a second reference signal which has a phase differing by approximately 180 degrees from a phase of the first reference signal, is applied to the second independent electrode, and
a difference between the first capacitance and the second capacitance is detected by detecting a signal which appears at the common electrode.
8. The optical switch according to claim 7 , wherein an amplifier circuit which generates the first reference signal and the second reference signal, and which amplifies the signal extracted from the common electrode, is provided to the fixed section or the base substrate.
9. The optical switch according to claim 7 , wherein
the elastic supporting section includes a first elastic supporting section and a second elastic supporting section which are provided substantially symmetrically, with the movable section sandwiched between the first elastic supporting section and the second elastic supporting section, and
a straight line which connects the first elastic supporting section and the second elastic supporting section is substantially orthogonal to a direction in which the plurality of movable mirrors is provided, and
wires from the movable electrode are drawn along the first elastic supporting section or the second elastic supporting section.
10. The optical switch according to claim 9 , wherein
wires from the movable electrode in the movable mirror which is disposed at an odd-number position when counted in an order from a predetermined side, are drawn along the first elastic supporting section, and
wires from the movable electrode in the movable mirror which is disposed at an even-number position when counted in an order from the predetermined side, are drawn along the second elastic supporting section.
11. The optical switch according to claim 9 , further comprising:
a plurality of metal columns for electrically connecting the fixed section and the base substrate, wherein
each of wires from the movable electrode is connected to the base substrate via the metal column.
12. The optical switch according to claim 9 , further comprising:
a fixed drive electrode which is provided on the fixed section and
a movable drive electrode which is provided on the movable section, and facing the fixed drive electrode, wherein
the movable section is caused to be inclined by electrostatic attraction between the fixed drive electrode and the movable drive electrode.
13. The optical switch according to claim 12 , wherein the fixed electrode and the fixed drive electrode, and the movable electrode and the movable drive electrode are provided by isolating electrically.
14. The optical switch according to claim 12 , wherein wires from the movable drive electrode and wires from the movable electrode are drawn to opposite sides in relation to the movable mirror.
15. The optical switch according to claim 4 , further comprising:
a fixed drive electrode which is provided on the fixed section; and
a movable drive electrode which is provided on the movable section, and facing the fixed drive electrode, wherein
the movable section is caused to be inclined by electrostatic attraction between the fixed drive electrode and the movable drive electrode.
16. The optical switch according to claim 15 , wherein the fixed electrode and the fixed drive electrode, and the movable electrode and the movable drive electrode are provided by isolating electrically.
17. The optical switch according to claim 15 , wherein wires from the movable drive electrode and wires from the movable electrode are drawn to opposite sides in relation to the movable mirror.
18. The optical switch according to claim 2 , wherein
the movable mirror includes
a movable section on which a mirror is provided,
a fixed section,
an elastic supporting section which inclinably supports the movable section with respect to the fixed section,
a base substrate which is connected to the fixed section, and is provided faring the movable section,
a fixed electrode which is provided on the base substrate, and
a movable electrode which is provided on the movable section, wherein
the mirror-angle detector detects the angle of inclination of the mirror based on an electrostatic capacitance between the fixed electrode and the movable electrode.
19. An optical switch comprising:
at least one input optical fiber to which optical signals of a plurality of wavelengths are input upon multiplexing;
at least one output optical fiber;
a wavelength dispersive element which performs a spectral separation of the optical signal from the input optical fiber to a plurality of optical signals of different wavelengths;
a plurality of movable mirrors, each of the mirrors being inclinable, and reflects each of the optical signal subjected to the spectral separation, from the wavelength dispersive element, and directs appropriately to the output optical fiber;
a mirror-angle detector which detects an angle of inclination of each movable mirror;
a first calculating unit which associates a first value which identifies the optical signals of the plurality of wavelengths, and a second value which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror; and
a control circuit which performs a feed-back control of the movable mirror such that a value of the angle of inclination of the movable mirror, which is output from the first calculating unit, and an output from the mirror angle detector match, wherein the first calculating unit further associates a third value which is equivalent to an amount of attenuation applied to the optical signal, with the angle of inclination of each movable mirror.
20. The optical switch according to claim 19 , wherein
the movable mirror includes
a movable section on which a mirror is provided,
a fixed section,
an elastic supporting section which inclinably supports the movable section with respect to the fixed section,
a base substrate which is connected to the fixed section, and is provided facing the movable section,
a fixed electrode which is provided on the base substrate, and
a movable electrode which is provided on the movable section, wherein
the mirror-angle detector detects the angle of inclination of the mirror based on an electrostatic capacitance between the fixed electrode and the movable electrode.
21. The optical switch according to claim 1 , wherein
the movable mirror includes
a movable section on which a mirror is provided,
a fixed section,
an elastic supporting section which inclinably supports the movable section with respect to the fixed section,
a base substrate which is connected to the fixed section, and is provided facing the movable section,
a fixed electrode which is provided on the base substrate, and
a movable electrode which is provided on the movable section, wherein
the mirror-angle detector detects the angle of inclination of the mirror based on an electrostatic capacitance between the fixed electrode and the movable electrode.
22. An optical switch comprising:
at least one input optical fiber to which optical signals of a plurality of wavelengths are input upon multiplexing;
at least one output optical fiber;
a wavelength dispersive element which performs a spectral separation of the optical signal from the input optical fiber to a plurality of optical signals of different wavelengths;
a plurality of movable mirrors, each of the mirrors being inclinable, and reflects each of the optical signal subjected to the spectral separation, from the wavelength dispersive element, and direct appropriately to the output optical fiber, and which movable mirrors include:
a movable section on which a mirror is provided,
a fixed section,
an elastic supporting section which inclinably supports the movable section with respect to the fixed section,
a base substrate which is connected to the fixed section, and is provided facing the movable section,
a fixed electrode which is provided on the base substrate, and
a movable electrode which is provided on the movable section;
a mirror-angle detector which detects an angle of inclination; of each movable mirror,
a first calculating unit which associates a first value which identifies the optical signals of the plurality of wavelengths, and a second value which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror; and
a control circuit which performs a feed-back control of the moveable mirror such that a value of the angle of inclination of the movable mirror, which is output from the first calculating unit, and an output from the mirror angle detector match, wherein
any one of the fixed electrode and the movable electrode includes a first independent electrode and a second independent electrode which are provided substantially symmetrically, sandwiching an axis of inclination of the movable section, the other one of the fixed electrode and the movable electrode includes a common electrode which is at a same electric potential, and
the mirror-angle detector detects the angle of inclination of the movable mirror based on a difference between a first capacitance which is determined byte first independent electrode and the common electrode, and a second capacitance which is determined by the second independent electrode and the common electrode.
23. The optical switch according to claim 22 , wherein
the fixed electrode includes the first independent electrode and the second independent electrode, and
the movable electrode includes the common electrode.
24. The optical switch according to claim 22 , wherein
a first reference signal is applied to the first independent electrode, and
a second reference signal which has a phase differing by approximately 180 degrees from a phase of the first reference signal, is applied to the second independent electrode, and
a difference between the first capacitance and the second capacitance is detected by detecting a signal which appears at the common electrode.
25. The optical switch according to claim 21 , further comprising:
a fixed drive electrode which is provided on the fixed section; and
a movable drive electrode which is provided on the movable section, and facing the fixed drive electrode, wherein
the movable section is caused to be inclined by electrostatic attraction between the fixed drive electrode and the movable drive electrode.
26. The optical switch according to claim 25 , wherein the fixed electrode and the fixed drive electrode, and the movable electrode and the movable drive electrode are provided by isolating electrically.
27. The optical switch according to claim 25 , wherein wires from the movable drive electrode and wires from the movable electrode are drawn to opposite sides in relation to the movable mirror.