Method of forming vertical inorganic alignment layer and liquid crystal display apparatus having the same
View Patent ↗A liquid crystal display apparatus includes a first display substrate, a second display substrate and a liquid crystal layer disposed therebetween. The first and second display substrates include first and second vertical inorganic alignment layers, respectively, to vertically align liquid crystal molecules of the liquid crystal layer. The first and second vertical inorganic alignment layers each include a silicon carbide and are formed on the first and second display substrates, respectively, by a chemical vapor deposition method or a sputtering method. Thus, processes for the vertical inorganic alignment layer may be simplified, thereby improving manufacturing productivity of the liquid crystal display apparatus.
1. A method of forming a vertical inorganic alignment layer, the method comprising:
disposing a process substrate in a process chamber inside which a first target having a silicon-containing material and a second target having a carbon-containing material are disposed;
injecting a nonvolatile gas into the process chamber;
supplying a power voltage to the first and second targets to activate the nonvolatile gas in a plasma state,
wherein the activated nonvolatile gas in the plasma state collides with the first and second targets such that silicon atoms and carbon atoms are discharged from the first and second targets, respectively, thereby forming the vertical inorganic alignment layer comprising a silicon carbide on the process substrate, and
irradiating an ion beam onto a surface of the vertical inorganic alignment layer to adjust a pretilt angle of the vertical inorganic alignment layer.
2. The method of claim 1 , wherein a composition ratio between the silicon and the carbon in the vertical inorganic alignment layer is in a range from about 1:0.5 to about 1:11.
3. The method of claim 2 , wherein a ground voltage is applied to the process substrate, a first radio frequency power and a second radio frequency power are applied to the first and second targets, respectively, and the composition ratio between the silicon and the carbon in the silicon carbide depends on an intensity of the first and second radio frequency powers.
4. The method of claim 1 , wherein the nonvolatile gas comprises an argon gas.
5. The method of claim 1 , wherein a hydrogen concentration rate in the vertical inorganic alignment layer is below about 30%.
6. The method of claim 1 , wherein the ion beam has an incidence angle from about 45 degrees to about 90 degrees relative to the surface of the vertical inorganic alignment layer.
7. The method of claim 1 , wherein the pretilt angle is from about 67 degrees to about 90 degrees.