Apparatus and method for exposing edge of substrate
View Patent ↗An apparatus and method for exposing an edge of a substrate are disclosed, in which an exposure time period for exposing the edge of the substrate is reduced. The apparatus for exposing an edge of a substrate includes a loading unit loading the substrate, and an edge exposure unit exposing the edge of the substrate loaded by the loading unit using each of a long side exposure unit and a short side exposure unit. Therefore, since the edge of the substrate is exposed using each of the long side exposure unit and the short side exposure unit, it is possible to reduce the edge exposure time period, thereby improving productivity. In addition, since no rotation of the substrate is required, it is possible to reduce the size of the apparatus. Moreover, since the apparatus is provided in an in-line type, it is possible to easily draw the substrate using a conveyer.
1. A method for exposing an edge of a substrate comprising:
a) mounting a substrate on a stage;
b) exposing an edge of the substrate mounted on the stage using a long side exposure unit and a short side exposure unit, wherein the long side exposure unit includes first and second driving bars arranged on the stage to face each other, a moving bar arranged between the first and second driving bars, and first and second optical systems arranged at both sides of the moving bar,
wherein the short side exposure unit includes a support bar, third and fourth optical systems arranged at both sides of the support bar;
c) drawing the substrate, whose edge has been exposed, from the stage and moving the substrate to the outside of the stage using a conveyer;
wherein the step c) includes:
inserting a plurality of guide wings arranged in parallel at constant intervals between the substrate and the stage;
driving at least one cylinder to ascend the plurality of guide wings; and
driving a plurality of rollers arranged in the plurality of guide wings to move the substrate.
2. The method as set forth in claim 1 , wherein the step b) includes:
moving the long side exposure unit to a first direction along long sides of the substrate to expose edges of the long sides of the substrate;
moving the stage to a second direction; and
exposing edges of short sides of the substrate, moved to the second direction by the stage, using the short side exposure unit.
3. The method as set forth in claim 1 , wherein the step b) includes:
moving the short side exposure unit to a first direction along short sides of the substrate to expose edges of the short sides of the substrate;
moving the stage to a second direction; and
exposing edges of long sides of the substrate, moved to the second direction by the stage, using the long side exposure unit.
4. A method for exposing an edge of a substrate comprising:
a) mounting a substrate on a stage;
b) exposing both edges of a first side of the substrate when the stage is stopped using a long side exposure unit, wherein the long side exposure unit includes first and second driving bars arranged on the stage to face each other, a moving bar arranged between the first and second driving bars, and first and second optical systems arranged at both sides of the moving bar;
c) exposing both edges of a second side of the substrate while moving the stage using a short side exposure unit, wherein the short side exposure unit includes a support bar, third and fourth optical systems arranged at both sides of the support bar; and
d) drawing the substrate of which both edges of the first side and the second side have been exposed from the stage and moving the substrate to the outside of the stage;
wherein the step d) includes:
inserting a plurality of guide wings arranged in parallel at constant intervals between the substrate and the stage;
driving at least one cylinder to ascend the plurality of guide wings; and
driving a plurality of rollers arranged in the plurality of guide wings to move the substrate.