Micro-electro-mechanical transducer having embedded springs

1. A micro-electro-mechanical transducer comprising:

a base having a lower portion and an upper portion;

a top plate disposed above the upper portion of the base forming a gap therebetween;

a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and the top plate; and

a first transducing member on the top plate and a second transducing member included in the base or carried by the base.

2. The micro-electro-mechanical transducer of claim 1 wherein the first transducing member is an electrode.

3. The micro-electro-mechanical transducer of claim 1 wherein the second transducing number comprises a conductive layer included in the upper portion of the base and serving as an electrode.

4. The micro-electro-mechanical transducer of claim 3 wherein the conductive layer is a separate layer disposed on rest of the upper portion.

5. The micro-electro-mechanical transducer of claim 1 further comprising a motion stopper disposed under the spring layer to limit a maximum vertical displacement thereof.

6. A micro-electro-mechanical transducer comprising:

a first support layer supporting a first electrode;

a second support layer supporting a second electrode, the second support layer having a pattern of openings and being connected to a substrate through a plurality of anchors;

a spring layer below the second support layer, the spring layer being connected to the plurality of anchors at various locations; and

a plurality of vertical connectors passing through the pattern of openings on the second support layer to connect the first support layer and the spring layer.

7. The micro-electro-mechanical transducer of claim 6 wherein the plurality of anchors each have a sidewall receding from an edge of a nearby opening of the second support layer to define a cavity under the second support layer, and wherein the spring layer forms a plurality of cantilevers each anchored at the respective sidewall of the plurality of anchors.

8. The micro-electro-mechanical transducer of claim 6 further comprising a motion stopper disposed under the spring layer to limit a maximum vertical displacement thereof.

9. A micro-electro-mechanical transducer comprising:

a base having a lower portion and an upper portion;

a top plate disposed above the upper portion of the base forming a gap therebetween;

a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base; and

a first transducing member on the top plate and a second transducing member included in the base or carried by the base.

10. The micro-electro-mechanical transducer of claim 9 wherein the transducing member is an electrode.

11. The micro-electro-mechanical transducer of claim 9 wherein the upper portion of the base comprises an electrode serving as the second transducing member.

12. The micro-electro-mechanical transducer of claim 9 wherein the vertical bendable connector has a curved shape.

13. A micro-electro-mechanical transducer comprising:

a base having a lower portion and an upper portion;

a top plate disposed above the upper portion of the base forming a gap therebetween;

a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and the top plate; and

a transducing member on the top plate,

wherein the lower portion of the base has a sidewall receding from an edge of the upper portion of the base to define a cavity under the upper portion, the spring layer being connected to the sidewall of the lower portion to form a cantilever disposed in the cavity.

14. A micro-electro-mechanical transducer comprising:

a base having a lower portion and an upper portion;

a top plate disposed above the upper portion of the base forming a gap therebetween;

a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base; and

a transducing member on the top plate,

wherein the upper portion of the base comprises a layer material having a pattern of trench openings passing from a top to the lower portion of the base, wherein the spring-like structure comprises a plurality of vertical bendable connectors disposed in the pattern of trench openings.

15. A micro-electro-mechanical transducer comprising:

a base having a lower portion and an upper portion;

a top plate disposed above the upper portion of the base forming a gap therebetween;

a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base; and

a transducing member on the top plate,

wherein the vertical bendable connector connects to the lower portion of the base through an anchor layer.

16. A micro-electro-mechanical transducer comprising:

a base having a lower portion and an upper portion;

a top plate disposed above the upper portion of the base forming a gap therebetween;

a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base; and

a transducing member on the top plate,

wherein the vertical bendable connector includes a first vertical electrode, and the upper portion of the base has a sidewall including a second vertical electrode, the first electrode and the second electrode forming a vertical capacitor.