IP Library Granted Patent US 7,732,253
Granted Patent B1
US 7,732,253 · App. 11/464,306 · Granted Jun 8, 2010

Flip-chip assembly with improved interconnect

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Quick Facts
Patent No.
US 7,732,253
App. No.
11/464,306
Granted
Jun 8, 2010
Kind
B1
Abstract

The present invention provides a unique way of connecting a flip-chip die to a substrate. Initially, metallic posts are formed on the flip-chip die and solder bumps are placed on the substrate where the metallic post will ultimately connect to the substrate. The tip layer of flash gold, tin, or other wettable electroplated material is applied to the tips of the metallic posts to prevent oxidation and enhance wettability. The sides of the metallic posts are allowed to oxidize to reduce wettability. To attach the flip-chip die to the substrate, the flip-chip die is initially positioned over the substrate, such that the metallic posts align with and come into contact with the solder bumps. Once the flip-chip die is in place over the substrate, the substrate and the flip-chip are heated to cause the solder bumps to reflow and bond to the tip layers of the metallic posts.

Claims (30)

1. A method comprising:

forming a plurality of metallic posts on a flip-chip die, each metallic post having an exposed tip;

forming a flash tin tip layer on the exposed tip of each metallic post;

forming a plurality of solder bumps on a substrate, wherein the plurality of solder bumps are positioned to align with the plurality of metallic posts on the flip-chip die;

after forming the flash tin tip layer on the exposed tip of each metallic post, positioning the flip-chip die over the substrate such that the flash tin tip layer of each of the plurality of metallic posts on the flip-chip die contacts a corresponding one of the plurality of solder bumps on the substrate; and

heating the plurality of solder bumps to cause each one of the plurality of solder bumps to reflow and attach to the flash tin tip layer of each of the plurality of metallic posts when the plurality of solder bumps cool such that each metallic post contains no solder and solder is not placed on the exposed tips prior to positioning the flip-chip die over the substrate and heating the plurality of solder bumps.

2. The method of claim 1 wherein the plurality of metallic posts are copper.

3. The method of claim 1 wherein the height of a metallic post is less than about 45 μm.

4. The method of claim 1 wherein the flash tin tip layer prevents oxidation and increases wettability of the exposed tip of each metallic post.

5. The method of claim 1 wherein the plurality of metallic posts are formed by an electroless process.

6. The method of claim 1 wherein the height of a solder bump is between about 25 and 100 μm.

7. The method of claim 2 wherein forming each of the plurality of metallic posts comprises forming a passivation layer about a bond pad on the flip-chip die, forming a barrier layer over the bond pad, forming a seed layer over the barrier layer, and forming a copper post over the seed layer.

8. The method of claim 7 wherein the copper post is formed by an electroplating process.

9. The method of claim 7 further comprising oxidizing exposed portions of the copper post.

10. The method of claim 1 wherein the plurality of solder bumps are applied by screen-printing solder onto the substrate.

11. A flip-chip assembly formed by a process comprising:

forming a plurality of metallic posts on a flip-chip die, each metallic post having an exposed tip;

forming a flash tin tip layer on the exposed tip of each metallic post;

forming a plurality of solder bumps on a substrate wherein the plurality of solder bumps are positioned to align with the plurality of metallic posts on the flip-chip die;

after forming the flash tin tip layer on the exposed tip of each metallic post, positioning the flip-chip die over the substrate such that the flash tin tip layer of each of the plurality of metallic posts on the flip-chip die contacts a corresponding one of the plurality of solder bumps on the substrate; and

heating the plurality of solder bumps to cause each one of the plurality of solder bumps to reflow and attach to the flash tin tip layer of each of the plurality of metallic posts when the plurality of solder bumps cool such that each metallic post contains no solder and solder is not placed on the exposed tips prior to positioning the flip-chip die over the substrate and heating the plurality of solder bumps.

12. The flip-chip assembly of claim 11 wherein the plurality of metallic posts are copper.

13. The flip-chip assembly of claim 11 wherein the height of a metallic post is less than about 45 μm.

14. The flip-chip assembly of claim 11 wherein the flash tin tip layer prevents oxidation and increases wettability of the exposed tip of each metallic post.

15. The flip-chip assembly of claim 11 wherein the plurality of metallic posts are formed by an electroless process.

16. The flip-chip assembly of claim 11 wherein the height of a solder bump is between about 25 and 100 μm.

17. The flip-chip assembly of claim 12 wherein forming each of the plurality of copper posts comprises forming a passivation layer about a bond pad on the flip-chip die, forming a barrier layer over the bond pad, forming a seed layer over the barrier layer, and forming a copper post over the seed layer.

18. The flip-chip assembly of claim 17 wherein the copper post is formed by an electroplating process.

19. The flip-chip assembly of claim 17 further comprising oxidizing exposed portions of the copper post.

20. The flip-chip assembly of claim 11 wherein the plurality of solder bumps are applied by screen-printing solder onto the substrate.

Assignments (4)
MERGER Recorded Jun 16, 2016
From: RF MICRO DEVICES, INC.
To: QORVO US, INC.
Reel/Frame 039196/0941 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS (RECORDED 3/19/13 AT REEL/FRAME 030045/0831) Recorded Mar 30, 2015
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: RF MICRO DEVICES, INC.
Reel/Frame 035334/0363 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Mar 19, 2013
From: RF MICRO DEVICES, INC.
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 030045/0831 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 14, 2006
From: MORRIS, T. SCOTT; HAJI-RAHIM, MOHSEN; SHAH, MILIND
To: RF MICRO DEVICES, INC.
Reel/Frame 018101/0533 →