Polishing pad and method of producing the same
View Patent ↗The invention provides a polishing pad by which optical materials such as lenses, reflecting mirrors etc., or materials requiring a high degree of surface planarity, as in the polishing of silicone wafers, glass substrates or aluminum substrates for hard disks, or general metal polishing, can be flattened with stability and high polishing efficiency. The invention also provides a polishing pad for semiconductor wafers, which is superior in planarizing characteristic, is free from scratches and can be produced at low cost. There is provided a polishing pad which is free from dechucking error so that neither damage to wafers nor decrease in operating efficiency occurs. There is provided a polishing pad which is satisfactory in planarity, within wafer uniformity, and polishing rate and produces less change in polishing rate. There is provided a polishing pad which can make planarity improvement and scratch decrease compatible.
1. A method of producing a polishing pad material comprising:
reacting a polyether polyol compound with toluene diisocyanate (TDI) to prepare a first prepolymer,
separately reacting the polyether polyol compound with 4,4′-dicyclohexylmethane diisocyanate (HMDI) to prepare second prepolymer,
mixing the first and second prepolymers in the presence of the first and second isocyanate compounds to prepare a starting pre-polymer,
wherein the amount of TDI and HMDI remaining in the starting prepolymer together is 20 wt % or less and the ratio of remaining HMDI to remaining TDI is 0.5 to 3.2:1,
adding hydroxyl-free silicon-based surfactant to the starting prepolymer in an amount of 0.05 to 5 wt % based on the amount of starting prepolymer,
stirring the component containing the surfactant to prepare a cell dispersion having inert gas bubbles dispersed therein,
mixing a curing agent with the cell dispersion,
casting a mixture into an open mold, and
heating the mixture in an oven so as to cure the mixture in the mold and produce a polyurethane resin foam
wherein the polyether polyol compound comprises both polytetramethylene glycol (PTMG) and diethlene glycol (DEG).
2. The method according to claim 1 , wherein the silicone-based surfactant is a polyalkylsiloxane/polyether copolymer.
3. The method according to claim 1 , wherein a polishing layer has closed cells.
4. The method according to claim 3 , wherein the number of the closed cells is 200 to 600 per mm 2 , and/or the average diameter of the closed cells is 30 to 60 μm.