MEMS switch and method for manufacturing the same
View Patent ↗A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.
1. A Micro-Electro-Mechanical Systems (MEMS) switch, comprising:
a lower substrate having a signal line on an upper surface of the lower substrate;
an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate;
a bimetal layer formed in the cavity of the upper substrate on the membrane layer;
a heating layer formed on a lower surface of the membrane layer; and
a contact member formed on a lower surface of the heating layer;
wherein the contact member can come into contact with or separate from the signal line.
2. The MEMS switch according to claim 1 , further comprising:
a sealing layer disposed between the upper and lower substrates for maintaining the distance between the upper and lower substrates and for sealing an inner space between the upper and lower substrates.
3. The MEMS switch according to claim 1 , further comprising:
a cover disposed over the upper substrate for covering the cavity.
4. The MEMS switch according to claim 1 , wherein the membrane layer is made of an oxide material.
5. The MEMS switch according to claim 1 , wherein the heating layer is made of a polysilicon material.
6. The MEMS switch according to claim 1 , wherein the heating layer comprises an electrical resistance heating body.
7. The MEMS switch according to claim 6 , wherein the electrical resistance heating body has a helical shape.
8. The MEMS switch according to claim 6 , wherein the electrical resistance heating body comprises:
a power supply unit for supplying a voltage.
9. The MEMS switch according to claim 8 , wherein the power supply unit comprises:
an upper voltage application pad connected to the electrical resistance heating body;
a lower voltage application pad formed on the upper surface of the lower substrate and connected to the upper voltage application pad;
a voltage connection part buried in the lower substrate through a hole and connected to the lower voltage application pad; and
an external voltage application pad formed on a lower surface of the lower substrate and connected to an external voltage application pad connected to the voltage connection part.
10. The MEMS switch according to claim 1 , further comprising:
a signal line connection unit for connecting the signal line on the lower substrate to an external circuit.
11. The MEMS switch according to claim 10 , wherein the signal line connection unit comprises:
a signal line connection part buried in the lower substrate through a hole and connected to the signal line; and
a signal line pad formed on a lower surface of the lower substrate and connected to the signal line connection part.
12. The MEMS switch according to claim 1 , wherein the upper and lower substrates are made of a silicon material and the cover is made of a glass material.
13. The MEMS switch according to claim 1 , wherein the signal line, contact member, and sealing layer are made of a bondable conductive material, and
wherein the conductive material is one of Au, AuSn, and PbSn.