Method for manufacturing printing plate
View Patent ↗A method for manufacturing a printing plate includes forming first trenches having a first depth into an insulative substrate, forming an organic film over the insulative substrate including the first trenches, and forming second trenches having a width smaller than that of the first trenches into the organic film, the second trenches formed at positions corresponding to the first trenches by selectively removing the organic film.
1. A method for manufacturing a printing plate comprising:
forming first trenches having a first depth into an insulative substrate;
forming an organic film over the insulative substrate including the first trenches; and
forming second trenches each having a width smaller than that of each the of first trenches into the organic film, the second trenches formed into the organic film in the first trenches by selectively removing the organic film in the first trenches,
wherein the organic film is formed at an area other than each second trench into each first trench and at area between the first trenches after forming the second trenches.
2. The method as set forth in claim 1 , further comprising forming a cover layer over the insulative substrate and the organic film.
3. The method as set forth in claim 2 , wherein the forming the cover layer includes forming one of an inorganic film and a metal film.
4. The method as set forth in claim 2 , wherein the forming of the cover layer includes forming one of SiN X , a-Si, and SiO X film.
5. The method as set forth in claim 2 , wherein the forming of the cover layer includes forming one of Cr, Mo, Al, and Cu film.
6. The method as set forth in claim 1 , wherein the second trenches are formed by forming a mask layer on the organic film and selectively removing the organic film with an etching gas containing F using the mask layer as a mask.
7. The method as set forth in claim 6 , wherein the mask layer includes a metal layer.
8. The method as set forth in claim 6 , wherein the etching gas containing F includes one of SF 6 gas and CF 4 gas.
9. The method as set forth in claim 1 , wherein the first trenches are formed in the insulative substrate by selectively removing the insulative substrate through isotropic etching.
10. The method as set forth in claim 1 , wherein the second trenches are formed in the organic film by selectively removing the organic film through dry etching.
11. The method as set forth in claim 1 , wherein the organic film includes one of acrylic-group material, BCB-group material, and SOG-group material.
12. A method for manufacturing a printing plate comprising:
forming first trenches having a first depth into an insulative substrate;
forming an organic film over the whole surface of the insulative substrate;
forming second trenches each into the organic film in each of the first trenches by selectively removing the organic film in the first trenches, and
forming a cover layer over the insulative substrate and the organic film including the second trenches to define a printing pattern;
wherein the organic film is formed at an area other than each second trench into each first trench and at area between the first trenches after forming the second trenches.
13. The method as set forth in claim 12 , wherein a width of the printing pattern is less than a depth of the printing pattern.
14. The method as set forth in claim 12 , wherein the cover layer film includes one of SiNx, a-Si, and SiOx.
15. The method as set forth in claim 12 , wherein the cover layer includes one of Cr, Mo, Al, and Cu.
16. The method as set forth in claim 12 , wherein the second trenches are formed by forming a mask layer on the organic film and selectively removing the organic film with an etching gas containing F using the mask layer as a mask.
17. The method as set forth in claim 16 , wherein the mask layer includes a metal layer.
18. The method as set forth in claim 16 , wherein the etching gas containing F includes one of SF 6 gas and CF 4 gas.
19. The method as set forth in claim 12 , wherein the second trenches are formed in the organic film by selectively removing the organic film through dry etching.
20. The method as set forth in claim 12 , wherein the organic film includes one of acrylic-group material, BCB-group material, and SOG-group material.