Thin plate supporting container
View Patent ↗A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a planar contact face which comes into contact with the slotted plate to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate. The upper receiving element on the slotted plate has a planar contact face. The lower fitting portion provides vertical, horizontal and front/rear positioning.
1. A thin plate supporting container comprising:
a container body for housing therein a plurality of thin plates,
a lid unit for closing the container body,
slotted plates fixed on side walls facing each other in the container body for supporting the thin plates housed on the inside from opposing sides,
a thin plate pressing member, fixed to the interior face of the lid unit, for supporting thin plates by pressing against upper portions of thin plates housed in the container body when the lid unit is attached to the container body, the thin plate pressing member having a plurality of pressing bands arranged in parallel, for individually contacting and supporting the thin plates at predetermined intervals, each of the pressing bands having a wavy shape, as seen with a line of vision perpendicular to the interior face of the lid unit, and extending along the periphery of a thin plate, to prevent a thin plate from entering a gap between adjacent pressing bands.