Thin plate supporting container
View Patent ↗A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a planar contact face which comes into contact with the slotted plate to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate. The upper receiving element on the slotted plate has a planar contact face. The lower fitting portion provides vertical, horizontal and front/rear positioning.
1. A thin plate supporting container comprising:
a container body for housing therein a plurality of thin plates,
a lid unit for closing the container body,
slotted plates fixed on side walls facing each other in the container body for supporting the thin plates housed therein from opposing sides,
a gasket fixed between the lid unit and the container body, said gasket having a base end supporting portion for supporting the whole by being fit to a rim of the lid unit, and a flange-shaped contact portion extending from the base end supporting portion to a distal end,
wherein the contact portion is bent to form an intermediate bent portion bulging toward and contacting only the rim of the lid, and an outer periphery portion extending away from the rim to the distal end, and
wherein the intermediate portion is pressed between the lid unit and the container body and the distal end of the contact portion is in contact with only the container body, in a state where the container body is closed by the lid unit, by the elastic force of the contact portion.
2. The thin plate supporting container according to claim 1
wherein the base end supporting portion includes a seal piece, seated in a groove in the rim of the lid unit; and
wherein an annular groove is formed in the seal piece for absorbing elastic deformation of the seal piece.
3. The thin plate supporting container according to claim 1 wherein a distal end face of the contact portion is in contact with the container body in the state where the container body is closed by the lid unit.