Semiconductor light emitting device and manufacturing method therefor
View Patent ↗A semiconductor light emitting device in the present invention is formed by laminating an epitaxial layer 30 including an AlGaInP active layer and a second wafer 23 which transmits light derived from the active layer. The crystal axes of the epitaxial layer 30 and the second wafer 23 are generally aligned with each other and are in the range of −15° to +15° with respect to a lateral face { 100 } of the second wafer 23 . This semiconductor light emitting device, which is a joining type with high external emission efficiency, allows uniform wafer bonding to be achieved over the entire wafer face with ease and with a high yield without causing bonding failure and wafer cracks.
1. A semiconductor light emitting device comprising:
a plurality of semiconductor layers including at least an emission layer;
a transparent layer which transmits light from the emission layer, the respective layers being laminated together; and
a bonding failure prevention groove formed on at least either one of bonding surfaces of the plurality of semiconductor layers or the transparent layer, wherein
crystal axes of the semiconductor layers and the transparent layer are generally aligned with each other,
a direction of lateral faces of the transparent layer is in a range of −15° to +15° with respect to a <100> direction, and
the bonding failure prevention groove extends so as to form an angle from 30 degrees to 60 degrees with respect to a {110} plane that is a wafer cleavage plane of the plurality of semiconductor layers and the transparent layer.
2. The semiconductor light emitting device according to claim 1 , wherein
the transparent layer has a multilayered structure.
3. The semiconductor light emitting device according to claim 1 , wherein
the lateral faces of the transparent layer are rough faces.
4. The semiconductor light emitting device according to claim 1 , wherein
projections and depressions are formed on the lateral faces of the transparent layer.
5. The semiconductor light emitting device according to claim 1 ,
wherein four corners of the semiconductor layer are trimmed.