Master mold, master mold fabrication method, and method for fabricating liquid crystal display device using the same
View Patent ↗A method for fabricating a liquid crystal display (LCD) device wherein a photolithography technique is replaced by soft lithography is disclosed. The method includes: forming a thin film transistor array substrate; forming a color filter substrate; bonding the thin film transistor array substrate and the color filter substrate; and applying a liquid crystal between the thin film transistor array substrate and the color filter substrate, wherein at least one of the forming the thin film transistor array substrate and the forming the color filter substrate includes a pattern forming method using a soft mold. The pattern forming method may be a soft lithography process that includes: contacting a soft mold having a particular pattern with a surface of a buffer layer and applying a constant heat to the soft mold and buffer layer to transfer the particular pattern onto the buffer layer.
1. A method for fabricating a master mold comprising:
stacking a material layer for a predetermined pattern on a main body, wherein the material layer for the predetermined pattern, is formed of one of metal, silicon dioxide (SiO 2 ), silicon nitride (SiNx), photoresist, and wax;
patterning the material layer by a photolithography process to form a pattern on the main body;
applying a hydrophobic group onto surfaces of the main body and the pattern by a plasma process to form a master mold, wherein the master mold comprises the main body, the pattern on the main body and the hydrophobic group on the surfaces of the main body and the pattern, and wherein the plasma process is performed using a gas containing a fluorine element, and wherein the hydrophobic group is applied onto the surface of the master mold by the plasma process so that an adhesive force between the master mold and a soft mold is weakened to easily perform the separation therebetween;
depositing and hardening a pre-polymer on a surface of the master mold which the plasma process is treated, wherein the pre-polymer is formed of one of polydimethylsiloxane (PDMS), polyurethane, and polyimide; and
separating the pre-polymer from the master mold to form the soft mold, wherein the pattern is transferred onto the surface of the soft mold.
2. The method of claim 1 , wherein the hydrophobic group is fluoride.
3. The method of claim 1 , wherein the main body is a glass substrate.
4. The method of claim 3 , wherein the main body is formed by stacking a metal layer on the glass substrate.
5. The method of claim 1 , wherein the gas containing the fluorine element is CF 4 or SF 6 .
6. A method for fabricating a master mold comprising:
stacking a material layer for a predetermined pattern on a main body, wherein the material layer for the predetermined pattern, is formed of one of metal, silicon dioxide (SiO 2 ), silicon nitride (SiNx), photoresist, and wax;
patterning the material layer by a photolithography process to form a pattern on the main body;
applying a hydrophobic group onto surfaces of the main body and the pattern by a plasma process to form a master mold, wherein the master mold comprises the main body, the pattern on the main body and the hydrophobic group on the surfaces of the main body and the pattern, and wherein the plasma process is performed using a gas containing a fluorine element, and wherein the hydrophobic group is applied onto the surface of the master mold by the plasma process so that an adhesive force between the master mold and a soft mold is weakened to easily perform the separation therebetween, and wherein the plasma process is applied by conditions comprising plasma power of 700 W, processing pressure of 200 Torr, flow amount of CF 4 of 100 sccm and processing duration of 30 seconds;
depositing and hardening a pre-polymer on a surface of the master mold which the plasma process is treated, wherein the pre-polymer is formed of one of polydimethylsiloxane (PDMS), polyurethane, and polyimides; and
separating the pre-polymer from the master mold to form the soft mold, wherein the pattern is transferred onto the surface of the soft mold.