Thin film transistor array panel for display and manufacturing method thereof
View Patent ↗A gate conductor including a gate line, a gate pad and a gate electrode is formed on a substrate. A gate insulating layer, a semiconductor layer, a doped amorphous silicon layer and a conductive layer are deposited in sequence, and then a photoresist film pattern is formed thereon. The photoresist film pattern includes a first portion positioned between the to be formed source electrode and drain electrode, a second portion thicker than the first portion, and the third portion with no photoresist. A data conductor including a data line, a data pad, a source electrode, a drain electrode and a conductor pattern for a storage capacitor, an ohmic contact layer pattern and a semiconductor pattern are formed by etching the conductive layer, the doped amorphous silicon layer and the semiconductor layer using the photoresist film pattern. A plurality of color filters of red, green and blue having apertures exposing part of the drain electrode are formed thereon. A passivation layer made of acryl-based organic material having excellent planarization characteristic is formed thereon. A pixel electrode, an auxiliary gate pad and an auxiliary data pad connected to the drain electrode, the gate pad and the data pad via contact holes, respectively, are formed on the passivation layer. The contact hole exposing the drain electrode is located within the aperture.
1. A method of manufacturing a thin film transistor array panel for a display, comprising:
forming a gate conductor including a gate line and a gate electrode on an insulating substrate;
forming a gate insulating layer covering the gate conductor;
forming a semiconductor pattern on the gate insulating layer;
forming a data conductor at least on the semiconductor pattern, the data conductor including a source electrode, and a drain electrode separated from the source electrode;
forming a color filter covering the data conductor using photoresist material including pigment, wherein the color filter includes a first aperture exposing at least a portion of the drain electrode;
depositing a passivation layer on the color filter;
patterning the passivation layer to form a first contact hole within the first aperture to expose at least a portion of the drain electrode; and
forming a pixel electrode connected to the drain electrode via the first contact hole,
wherein the first aperture is only formed on the drain electrode.
2. The method of claim 1 , wherein the data conductor further includes a conductor pattern overlapping the gate line or a storage electrode line formed of the same layer as the gate line, to form the storage capacitor, the color filter has a second aperture exposing at least a portion of the conductor pattern, and the passivation layer has a second contact hole located within the second aperture and exposing at least a portion of the conductor pattern.
3. The method of claim 1 , wherein the deposition of the passivation layer is performed by coating organic material or by chemical vapor depositing an insulating layer having dielectric constant equal to or less than 4.0.
4. The method of claim 1 , further comprising forming an interlayer insulating layer of SiNx or SiOx under the color filter.
5. The method of claim 1 , wherein the third portion has a thickness less than the first portion and the second portion.