Cleaning solution for substrate for semiconductor device and cleaning method
View Patent ↗To provide a cleaning solution for a substrate for a semiconductor device capable of removing particle contamination, organic contamination and metal contamination at the same time without corroding the substrate surface, and further having good water rinsability and capable of making the substrate surface highly clean in a short time, and a cleaning method.
1. A cleaning solution for a substrate for a semiconductor device, which comprises the following components (a), (b), (c) and (d), wherein the weight ratio of the component (a) to the component (b) (component (a)/component (b)) is at least 0.8 and at most 5, and said solution has a pH of at least 1.5 and less than 6.5:
component (a): an organic acid;
component (b): an organic alkaline component represented by the following formula (I),
(R 1 ) 4 N + OH − (I),
wherein R 1 is a hydrogen atom or an alkyl group which may be substituted by a hydroxyl group, an alkoxy group or halogen, and four R 1 may all be the same or different from one another, provided that a case where all are simultaneously hydrogen atoms, is excluded;
component (c): at least one anionic surfactant selected from the group consisting of an alkylsulfonic acid or a salt thereof, an alkylbenzenesulfonic acid or a salt thereof, an alkyldiphenyl ether disulfonic acid or a salt thereof, an alkylmethyltaurate or a salt thereof, an alkyl sulfate or a salt thereof, an alkyl ether sulfate or a salt thereof, and a sulfosuccinic acid diester or a salt thereof; and
component (d): water.
2. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the substrate for a semiconductor device has a metal wiring on its surface.
3. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the substrate for a semiconductor device has a low dielectric constant insulating film on its surface.
4. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the component (a) is a C 1-10 organic compound having at least one carboxyl group.
5. The cleaning solution for a substrate for a semiconductor device according to claim 4 , wherein the component (a) is at least one organic acid selected from the group consisting of acetic acid, propionic acid, oxalic acid, succinic acid, malonic acid, citric acid, tartaric acid and malic acid.
6. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the component (b) is a quaternary ammonium hydroxide having a C1-4 alkyl group and/or a C1-4 hydroxyalkyl group.
7. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the content of the component (a) is from 0.05 to 10 wt%.
8. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the content of the component (b) is from 0.01 to 10 wt%.
9. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the content of the component (c) is from 0.0003 to 0.1 wt%.
10. The cleaning solution for a substrate for a semiconductor device according to claim 1 , wherein the weight ratio of the component (c) to the compound (b) component (c)/component (b)) is at least 0.01 and at most 0.2.
11. A method for cleaning a substrate for a semiconductor device, which comprises cleaning a substrate for a semiconductor device by means of a solution which comprises the following components (a), (b), (c) and (d), wherein the weight ratio of the component (a) to the component (b) (component (a)/component (b)) is at least 0.8 and at most 5, and said solution has a pH of at least 1.5 and less than 6.5:
component (a): an organic acid;
component (b): an organic alkaline component represented by the following formula (I),
(R 1 ) 4 N + OH − (I),
wherein R 1 is a hydrogen atom or an alkyl group which may be substituted by a hydroxyl group, an alkoxy group or halogen, and four R 1 may all be the same or different from one another, provided that a case where all are simultaneously hydrogen atoms, is excluded;
component (c): at least one anionic surfactant selected from the group consisting of an alkylsulfonic acid or a salt thereof, an alkylbenzenesulfonic acid or a salt thereof, an alkyldiphenyl ether disulfonic acid or a salt thereof, an alkylmethyltaurate or a salt thereof, an alkyl sulfate or a salt thereof, an alkyl ether sulfate or a salt thereof, and a sulfosuccinic acid diester or a salt thereof; and
component (d): water.
12. The method for cleaning a substrate for a semiconductor device according to claim 11 , wherein the substrate for a semiconductor device has a Cu film and a low dielectric constant insulating film on the substrate surface, and the substrate is cleaned after CMP treatment.
13. The method for cleaning a substrate for a semiconductor device according to claim 12 , wherein the CMP treatment is carried out by an abrasive containing an azole type anticorrosive.