Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method
View Patent ↗A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. An ion beam is used to treat an infrared (IR) reflecting layer(s) of such a coated article. Advantageously, this has been found to improve sheet resistance (R s ) properties, emittance, solar control properties, and/or durability of the coated article.
1. A method of making a coated article, the method comprising:
providing a glass substrate;
forming at least one dielectric layer on the substrate;
forming an infrared (IR) reflecting layer on the substrate over at least the first dielectric layer, where said forming of the IR reflecting layer comprises ion beam treating the IR reflecting layer, and wherein a voltage at an ion source used for said ion beam treating is increased during formation of the IR reflecting layer; and
forming at least one additional dielectric layer on the substrate over at least the IR reflecting layer.
2. The method of claim 1 , wherein said at least one dielectric layer comprises at least one of silicon nitride and zinc oxide.
3. The method of claim 1 , wherein said additional dielectric layer comprises at least one of tin oxide and silicon nitride.
4. The method of claim 1 , wherein said ion beam consists essentially of ions from an inert gas used in an ion source(s).
5. The method of claim 1 , wherein said ion beam is substantially free of oxygen ions.
6. The method of claim 1 , wherein the ion beam is utilized in a manner so as to cause the IR reflecting layer to have compressive stress.
7. The method of claim 1 , further comprising forming at least a layer comprising NiCr on the substrate over at least the IR reflecting layer.
8. The method of claim 1 , wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s ) and/or emissivity of the IR reflecting layer to be less than if the ion beam had not been used.
9. The method of claim 1 , wherein the IR reflecting layer is initially deposited by sputtering at least one target, and wherein said ion beam treating is performed by directing ions at the IR reflecting layer after the layer has been initially deposited by sputtering.
10. The method of claim 1 , wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s ) and/or emissivity of the IR reflecting layer to be at least 5% less than if the ion beam had not been used.
11. The method of claim 1 , further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 70% and a sheet resistance (R s ) of no greater than 5.0 ohms/square.
12. The method of claim 1 , further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 75% and a sheet resistance (R s ) of no greater than 3.0 ohms/square.
13. The method of claim 1 , wherein prior to any optional heat treating, the coated article in monolithic form has a visible transmission of at least 70% and a sheet resistance (R s ) of no greater than 5.0 ohms/square.
14. The method of claim 1 , further comprising forming a layer comprising zinc oxide on the glass substrate in a position so that the IR reflecting layer is formed directly on and contacting the layer comprising zinc oxide, and wherein the IR reflecting layer comprises silver.
15. The method of claim 1 , further comprising forming another IR reflecting layer comprising silver.
16. The method of claim 1 , wherein the infrared (IR) reflecting layer has a first layer portion and second layer portion and each of the first layer portion and the second layer portion is substantially metallic.
17. The method of claim 1 , wherein said ion beam treating of the IR reflecting layer comprises using a simultaneous combination of an ion beam and material moving toward the substrate from a sputtering target used in forming the IR reflecting layer.
18. The method of claim 1 , wherein the IR reflecting layer comprises silver.