Laser induced thermal imaging (LITI) mask and an organic electroluminescent device fabrication method using the mask
View Patent ↗A Laser Induced Thermal Imaging (LITI) mask and an organic electroluminescent device fabrication method using the mask provides a LITI mask in which corner regions are reinforced to improve adhesive force between a receptor substrate and a transfer layer on corners of a pixel portion of the receptor substrate, and an organic electroluminescent device fabrication method using such a LITI mask.
1. A Laser Induced Thermal a (LITI) mask, comprising:
a first pattern portion; and
a second pattern portion arranged on a portion eluding an apex on at least one side of the first pattern portion;
wherein the second pattern portion has area in a range of 8 to 8,500 μm 2 .
2. The LITI mask according to claim 1 , wherein the second pattern portion is projected 2 to 30 μm from the portion that includes the apex on at least one side of the first pattern portion.
3. The LITI mask according to claim 1 , wherein a length of one surface of the second pattern portion is in a range of 4 to 60 μm.
4. The LITI mask according to claim 1 , wherein the second pattern portion surrounds the apex of the first pattern portion.
5. The LITI mask according to claim 1 , wherein the second pattern portion has a curved shape.
6. The LITI mask according to claim 5 , wherein the second pattern portion has a circular shape having a radius in a range of 4 to 60 μm and centered around the apex of the first pattern portion.
7. The LITI mask according to claim rein ask is applied to a LITI device equipped with an equal-magnification projection lens.
8. The LITI ask according to claim 1 , wherein the LITI ask has one of a stripe, mosaic or delta shape.
9. A method of employing the LITI mask of claim 1 for fabricating an organic electroluminescent device, comprising:
forming a first electrode on a substrate;
laminating a donor substrate onto an upper portion of the first electrode formed on the substrate;
forming an organic layer pattern by irradiating laser beam passing through the LITI mask including the first pattern portion; and the second pattern portion arranged on the portion including the apex on at least one side of the first pattern portion; and
forming a second electrode on an upper portion of the, organic layer pattern; wherein a reinforced region having an area in a range of 8 to 8,500 μm 2 is formed on a portion including an apex on at least one side of the organic layer pattern.
10. A Laser Induced Thermal Imaging (LITI) mask, comprising:
a first pattern portion; and
a second pattern portion arranged on a portion including an apex on at least one side of the first pattern portion;
wherein the second pattern portion has length in a range of 2 to 30 μm from the portion that includes the apex on at least one side of the first pattern portion.
11. The LITI mask according to claim 10 , wherein the second pattern portion has length in a range of 4 to 60 μm.
12. The LITI mask according to claim 10 , wherein the LITI mask is applied to a LITI device equipped with an equal-magnification projection lens.
13. The LITI mask according to claim 10 , wherein the LITI mask has one of a stripe, mosaic or delta shape.
14. A method of fabricating an organic electroluminescent device, comprising:
forming a first electrode on a substrate;
laminating a donor substrate onto an upper portion of the first electrode formed on the substrate;
forming an organic layer pattern by irradiating a laser beam passing through a Laser Induced Thermal Imaging (LITI) mask including a first pattern portion; and a second pattern portion arranged on a portion including an apex on at least one side of the first pattern portion; wherein the second pattern portion has area in a range of 8 to 8,500 μm 2 on the donor substrate; and
forming a second electrode on an upper portion of the organic layer pattern; wherein a reinforced region having an area in a range of 8 to 8,500 μm 2 is formed on a portion including an apex on at least one side of the organic layer pattern.
15. The method according to claim 14 , wherein the organic layer pattern is formed with a laser generator and a laser irradiation apparatus including an equal-magnification projection lens.
16. The method according to claim 15 , wherein the organic layer pattern is formed in a pattern shape of the LITI mask.
17. An organic electroluminescent device, comprising:
forming a first electrode on a substrate;
forming an organic layer pattern including at least an emitting layer on the first electrode; and
forming a second electrode on the organic layer pattern,
forming a reinforced region having an area in a range of 8 to 8,500 μm 2 on a portion including an apex on at least one side of the organic layer pattern.
18. A method of fabricating an organic electroluminescent device comprising:
forming a first electrode on a substrate;
laminating a donor substrate onto an upper portion of the first electrode formed on the substrate;
forming an organic layer pattern by irradiating a laser beam passing through the Laser Induced Thermal Imaging (LITI) mask including: a first pattern portion; and a second pattern portion arranged on a portion including an apex on at least one side of the first pattern portion; wherein the second pattern portion has area in a range of 8 to 8,500 μm 2 on the donor substrate and wherein a length of one surface of the second pattern portion is in a range of 4 to 60 μm; and
forming a second electrode on an upper portion of the organic layer pattern; wherein a reinforced region having an area in a range of 8 to 8,500 μm 2 is formed on a portion including an apex on at least one side of the organic layer pattern.
19. The method according to claim 18 , wherein the organic layer pattern is formed with a laser generator and a laser irradiation apparatus including an equal-magnification projection lens.
20. The method according to claim 19 , wherein the organic layer pattern is formed in a pattern shape of the LITI mask.